Substrate temperature effects on the microhardness and adhesion of diamond-like thin films

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 563-566

  Martinez, E ^a   Polo, M C ^a   Pascual, E ^a   Esteve, J ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Diamond like carbon; Microhardness; PECVD; Scratch measurements

Indexed keywords

ADHESION; CARBON; CHEMICAL BONDS; FRICTION; MICROHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL EFFECTS; THIN FILMS;

DIAMOND-LIKE CARBON FILMS; SCRATCH MEASUREMENTS;

AMORPHOUS FILMS;

EID: 0032608060     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00351-3     Document Type: Article

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