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Volumn 8, Issue 2-5, 1999, Pages 563-566
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Substrate temperature effects on the microhardness and adhesion of diamond-like thin films
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Author keywords
Diamond like carbon; Microhardness; PECVD; Scratch measurements
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Indexed keywords
ADHESION;
CARBON;
CHEMICAL BONDS;
FRICTION;
MICROHARDNESS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
THERMAL EFFECTS;
THIN FILMS;
DIAMOND-LIKE CARBON FILMS;
SCRATCH MEASUREMENTS;
AMORPHOUS FILMS;
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EID: 0032608060
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(98)00351-3 Document Type: Article |
Times cited : (25)
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References (20)
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