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Volumn 8, Issue 2-5, 1999, Pages 563-566

Substrate temperature effects on the microhardness and adhesion of diamond-like thin films

Author keywords

Diamond like carbon; Microhardness; PECVD; Scratch measurements

Indexed keywords

ADHESION; CARBON; CHEMICAL BONDS; FRICTION; MICROHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL EFFECTS; THIN FILMS;

EID: 0032608060     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00351-3     Document Type: Article
Times cited : (25)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.