Intrinsic stress measured on ultra-thin amorphous carbon films deposited on AFM cantilevers

Diamond and Related Materials

Volumn 10, Issue 1, 2001, Pages 94-98

  Lemoine, P ^a   Zhao, J F ^a   Bell, A ^a   Maguire, P ^a   McLaughlin, J ^a  

^a UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

AFM cantilever; Amorphous carbon; Compressive stresses; Ultra thin films

Indexed keywords

CARBON; COMPRESSIVE STRESS; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; ULTRATHIN FILMS;

AMORPHOUS CARBON; ATOMIC FORCE CANTILEVERS;

AMORPHOUS FILMS;

CARBON; COATING; FILM; MEASUREMENT METHOD; STRESS;

EID: 0035055604     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00455-6     Document Type: Article

References (19)