Dependence of plasma-induced modification of polymer surfaces on polyatomic ion chemistry

Applied Physics Letters

Volumn 84, Issue 25, 2004, Pages 5118-5120

  Jang, Inkook ^a   Sinnott, Susan B ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINATION; FLUOROCARBON PLASMAS; ION BEAM DEPOSITION; PLASMA INDUCED MODIFICATION;

BOUNDARY CONDITIONS; CHEMICAL MODIFICATION; COMPUTER SIMULATION; DEPOSITION; EQUATIONS OF MOTION; FILM GROWTH; FLUOROCARBONS; ION BEAMS; MOLECULAR DYNAMICS; POLYSTYRENES; SURFACE TREATMENT; THIN FILMS;

PLASMA APPLICATIONS;

EID: 3142686698     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1764597     Document Type: Article

References (21)

1. S. H. Wheale, C. P. Barker, and J. P. S. Badyal, Langmuir 14, 6699 (1998).
2. A. von Keudell, Thin Solid Films 402, 1 (2002).
3. E. T. Ada, O. Kornienko, and L. Hanley, J. Phys. Chem. B 102, 3959 (1998).
4. M. B. J. Wijesundara, Y. Ji, B. Ni, S. B. Sinnott, and L. Hanley, J. Appl. Phys. 88, 5004 (2000).
5. O. Cunge and J. P. Booth, J. Appl. Phys. 85, 3952 (1999).
6. M. P. Allen and D. J. Tildesley, Computer Simulation of Liquids (Oxford University Press, New York, 1987).
7. D. W. Brenner, O. A. Shenderova, J. A. Harrison, S. J. Stuart, B. Ni, and S. B. Sinnott, J. Phys.: Condens. Matter 14, 783 (2002).
8. J. Tanaka, C. F. Abrams, and D. B. Graves, J. Vac. Sci. Technol. A 18, 938 (2000).
9. C. F. Abrams and D. B. Graves, J. Appl. Phys. 86, 5938 (1999).
10. W. R. Koppers, M. A. Gleeson, J. Lourenco, T. L. Weeding, J. Los, and A. W. Kleyn, J. Chem. Phys. 110, 2588 (1999).
11. W. R. Koppers, J. H. M. Beijersbergen, T. L. Weeding, P. G. Kistemaker, and A. W. Kleyn, J. Chem. Phys. 107, 10736 (1997).
12. T. Ast, D. E. Riederer, S. A. Miller, M. Morris, and R. G. Cooks, Org. Mass Spectrom. 28, 1021 (1993).
13. M. J. Sowa, M. E. Littau, V. Pohray, and J. L. Ceechi, J. Vac. Sci. Technol. A 18, 2122 (2000).
14. M. Inayoshi, M. Ito, M. Hori, T. Goto, and M. Hiramatsu, J. Vac. Sci. Technol. A 16, 233 (1998).
15. J. H. Wang, J. J. Chen, and R. B. Timmons, Chem. Mater. 8, 2212 (1996).
16. K. Takahashi, A. Itoh, T. Nakamura, and K. Tachibana, Thin Solid Films 374, 303 (2000).
17. D. C. Gray, H. H. Sawin, and J. W. Butterbaugh, J. Vac. Sci. Technol. A 9, 779 (1991).
18. N. M. Mackie, V. A. Venturo, and E. R. Fisher, J. Phys. Chem. B 101, 9425 (1997).
19. M. Nakamura, M. Hori, T. Goto, M. Ito, and N. Ishii, J. Vac. Sci. Technol. A 19, 2134 (2001).
20. M. B. J. Wijesundara, L. Hanley, B. R. Ni, and S. B. Sinnott, Proc. Natl. Acad. Sci. U.S.A. 97, 23 (2000).
21. C.-M. Chan, Polymer Surface Modification and Characterization (Hanser/ Gardner, New York, 1994).