Properties of EUV and particle generations from laser-irradiated solid- and low-density tin targets

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5751, Issue I, 2005, Pages 578-587

  Fujioka, Shinsuke ^a   Nishimura, Hiroaki ^a   Okuno, Tomoharu ^a   Tao, Yezheng ^a   Ueda, Nobuyoshi ^a   Ando, Tsuyoshi ^a   Kurayama, Hiroto ^a   Yasuda, Yuzuri ^a   Uchida, Shigeaki ^b   Shimada, Yoshinori ^b   Yamaura, Michiteru ^b   Gu, Qincui ^a   Nagai, Keiji ^a   Norimatsu, Takayoshi ^a   Furukawa, Hiroyuki ^b   Sunahara, Atsushi ^b   Kang, Young G ^a   Murakami, Masakatsu ^a   Nishihara, Katsunobu ^a   Miyanaga, Noriaki ^a   Izawa, Yasukazu ^a   more..

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

Author keywords

Debris; EUV; Laser produced plasmas; Mass limited target; Opacity

Indexed keywords

DEBRIS; ION BEAMS; LASER ABLATION; MAGNETOELECTRIC EFFECTS; OPACITY; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; SPECTROGRAPHS; TIN; ULTRAVIOLET RADIATION;

EXTREME ULTRA-VIOLET (EUV) LITHOGRAPHY; MASS-LIMITED TARGET; OPTICAL THICKNESS; PARTICLE GENERATIONS;

LASER PRODUCED PLASMAS;

EID: 24644484042     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.598692     Document Type: Conference Paper

References (16)

1. G. O'Sullivan and P. K. Carroll, J. Opt. Soc. Am. 71, 227 (1981).
2. R. C. Spitzer, T. J. Orzechowski, D. W. Phillion, R. L. Kauffman, and C. Cerjan, J. Appl. Phys. 79, 2251 (1996).
3. Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, et al., Appl. Phys. Lett. 86, 051501 (2005).
4. M. Richardson, D. Torres, C. DePriest, F. Jin, and G. Shimkaveg, Opt. Commun 145, 109 (1998).
5. M. Richardson, C.-S. Koay, K. Takenoshita, C. Keyser, and M. Al-Rabban, J. Vac. Sci. Technol. B 22, 785 (2004).
6. H. Komori, Y. Imai, G. Soumagne, T. Abe, T. Suganuma, and A. Endo, in 3rd International EUVL Symposium (2004), Co05.
7. K. Takenoshita, C.-S. Koay, M. C. Richardson, and I. C. E. Turcu (SPIE, 2003), vol. 5037, pp. 792-800.
8. A. Sunahara, K. Nishihara, K. Gamada, T. Nishikawa, A. Sasaki, H. Furukawa, M. Yamaura, S. Fujioka, Y. Tao, Y. Shimada, et al., in 3rd. International EUVL Symposium (2004).
9. C. Yamanaka, Y. Kato, Y. Izawa, K. Yoshida, T. Yamanaka, T. Sasaki, M. Nakatsuka, T. Mochizuki, J. Kuroda, and S. Nakai, IEEE J. Quantum Electron. QE-17, 1639 (1981).
10. G. Winhart, K. Eidmann, C. A. Iglesias, and A. Bar-Shalom, Phys. Rev. E 53, R1332 (1996).
11. K. Nagai, H. Nishimura, T. Okuno, T. Hibino, R. Matsui, Y. Tao, M. Nakai, T. Norimatsu, N. Miyanaga, K. Nishihara, and Y. Izawa, Trans. Matter. Res. Soc. Jpn. 29, 943 (2004).
12. M. Yamaura, S. Uchida, A. Sunahara, Y. Shimada, K. Hashimoto, C. Yamanaka, K. Shigemori, S. Fujioka, T. Okuno, K. Nagai, et al. (SPIE, 2004), vol. 5448, pp. 1159-1164.
13. T. Okuno, H. Nishimura, S. Fujioka, Y. Tao, T. Hibino, R. Matsui, Q. Gu, K. Nagai, T. Norimatsu, K. Nishihara, N. Miyanaga, and Y. Izawa, submitted to Appl. Phys. Lett..
14. S. Sakabe, T. Mochizuki, T. Yamanaka, and C. Yamanaka, Rev. Sci. Instrum. 51, 1314 (1980).
15. A. Ng, D. Pasini, P. Celliers, D. Parfeniuk, L. Da Silva, and J. Kwan, Appl. Phys. Lett. 45, 1046 (1984).
16. P. Mora, Phys. Rev. Lett. 90, 185002 (2003).