Ultrafast laser micromachining of thermal sprayed coatings for microheaters: Design, fabrication and characterization

Sensors and Actuators, A: Physical

Volumn 114, Issue 1, 2004, Pages 102-111

  Tong, Tao ^a   Li, Jinggao ^a   Chen, Qing ^a   Longtin, Jon P ^a   Tankiewicz, Szymon ^b   Sampath, Sanjay ^b  

^a Stony Brook University   (United States)

^b STONY BROOK UNIVERSITY   (United States)

Author keywords

Bimorph beam; Microheaters; Ultrafast laser

Indexed keywords

FUNCTIONS; HEAT FLUX; MICROMACHINING; SAMPLING; SPRAYED COATINGS; ULTRAFAST PHENOMENA;

BIMORPH BEAM; MICROHEATERS; ULTRAFAST LASER; WORKING TEMPERATURE;

LASER PULSES;

EID: 3042811849     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.02.012     Document Type: Article

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