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Volumn 83, Issue 1, 2000, Pages 231-236

Vaporizing liquid microthruster

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NOZZLES; SILICON WAFERS; SPACECRAFT PROPULSION; VAPORIZATION;

EID: 0033752132     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00389-1     Document Type: Article
Times cited : (88)

References (13)
  • 1
    • 0030182761 scopus 로고    scopus 로고
    • Coordination and control of multiple microspacecraft moving in formation
    • Wang P.K., Hadaegh F.Y. Coordination and control of multiple microspacecraft moving in formation. Journal of the Astronautical Sciences. 44(3):1996;315-355.
    • (1996) Journal of the Astronautical Sciences , vol.44 , Issue.3 , pp. 315-355
    • Wang, P.K.1    Hadaegh, F.Y.2
  • 2
    • 0024732766 scopus 로고
    • Electromagnetically launched microspacecraft for space science missions
    • Jones R.M. Electromagnetically launched microspacecraft for space science missions. Journal of Spacecraft and Rockets. 26(5):1989;338-342.
    • (1989) Journal of Spacecraft and Rockets , vol.26 , Issue.5 , pp. 338-342
    • Jones, R.M.1
  • 6
    • 0030378760 scopus 로고    scopus 로고
    • Design, fabrication and testing of polysilicon microheaters in silicon
    • George N., Srivastava A. Design, fabrication and testing of polysilicon microheaters in silicon. SPIE. 2880:1996;224-230.
    • (1996) SPIE , vol.2880 , pp. 224-230
    • George, N.1    Srivastava, A.2
  • 7
    • 0000394072 scopus 로고    scopus 로고
    • Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback
    • Klaassen E., Petersen K., Noworolski J., Logan J., Maiuf N. Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback. Sensors and Actuators, A. 54:1996;709-713.
    • (1996) Sensors and Actuators, a , vol.54 , pp. 709-713
    • Klaassen, E.1    Petersen, K.2    Noworolski, J.3    Logan, J.4    Maiuf, N.5
  • 8
    • 0028378557 scopus 로고
    • Fabrication of silicon membrane using fusion bonding and two step electrochemical etching-stopping
    • Ju B., Oh M. Fabrication of silicon membrane using fusion bonding and two step electrochemical etching-stopping. Journal of Material Science. 29:1994;664-668.
    • (1994) Journal of Material Science , vol.29 , pp. 664-668
    • Ju, B.1    Oh, M.2
  • 9
    • 0032046895 scopus 로고    scopus 로고
    • Microjoinery: Concept, definition, and application to microsystem development
    • See also
    • Gonzalez C., Smith R.L., Howitt D.G., Collins S.D. Microjoinery: concept, definition, and application to microsystem development. Sensors and Actuators, A. 66(1-3):1998;315-332. See also http://www.ece.ucdavis.edu/misl/homepage.htm.
    • (1998) Sensors and Actuators, a , vol.66 , Issue.13 , pp. 315-332
    • Gonzalez, C.1    Smith, R.L.2    Howitt, D.G.3    Collins, S.D.4
  • 10
    • 0014800514 scopus 로고
    • Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology
    • Kern W., Puotinen D.A. Cleaning solutions based on hydrogen peroxide for use in silicon semiconductor technology. RCA Review. 31:1970;187-205.
    • (1970) RCA Review , vol.31 , pp. 187-205
    • Kern, W.1    Puotinen, D.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.