Fabrication of a thermopneumatic microactuator with a corrugated p+silicon diaphragm

Sensors and Actuators, A: Physical

Volumn 80, Issue 1, 2000, Pages 62-67

  Chan Jeong, Ok ^a   Sik Yang, Sang ^a  

^a Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTOR JUNCTIONS;

THERMOPNEUMATIC MICROACTUATORS;

MICROACTUATORS;

EID: 0343627832     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00300-3     Document Type: Article

References (7)

1. A. Olsson, P. Enoksson, G. Stemme, E. Stemme, A Valveless Planar Pump in Silicon, Tech. Digest, IEEE Int. Conf. on Solid State Sensors and Actuators, Vol. 2, Stockholm, Sweden, June 25-29, 1995, pp. 291-294.
2. T.S.J. Lammerink, M. Elwenspoek, J.H.J. Fluitman, Micro Liquid Dosing System, Proc. IEEE MEMS Workshop, Fort Lauderdale, FA, USA, Feb. 11-15, 1993, pp. 25-29.
3. Y. Shinozawa, T. Abe, T. Kondo, A Proportional Microvalve using a Bi-Stable Magnetic Actuator, Proc. IEEE MEMS Workshop, Nagoya, Japan, Jan. 26-30, 1997, pp. 233-237.
4. R. Zengerle, S. Kluge, M. Richter, A. Richter, A Bidirectional Silicon Micropump, Proc. IEEE MEMS Workshop, Amsterdam, the Netherlands, Jan. 29-Feb. 2, 1995, pp. 19-24.
5. + diaphragms. Sensors and Actuators A. 50:1995;151-156.
6. Yang E.H., Yang S.S., Jeong O.C. Fabrication and electrostatic actuation of thin diaphragms. KSME Int. J. 12(2):1998;161-169.
7. Scheeper P.R., Olthuis W., Bergveld P. The design, fabrication, and testing of corrugated silicon diaphragm. IEEE/ASME Journal of Microelectromechanical Systems. 3:1994;36-42.