Micromachined convective accelerometers in standard integrated circuits technology

Applied Physics Letters

Volumn 76, Issue 4, 2000, Pages 508-510

  Milanović, Veljko ^a   Bowen, Edwin ^b   Zaghloul, Mona E ^c   Tea, Nim H ^d   Suehle, John S ^d   Payne, Beverly ^d   Gaitan, Michael ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b RF Microsystems Inc   (United States)

^c George Washington University   (United States)

^d NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001545495     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125803     Document Type: Article

References (7)

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4. R. Dao, D. E. Morgan, H. H. Kries, and D. M. Bachelder, U.S. Patent No. 5 581 034 (1996).
5. A. M. Leung, J. Jones, E. Czyzewska, J. Chen, and M. Pascal, Tech. Dig. Int. Electron Device Meet. 1, 899 (1997).
6. C. Zincke, Master's thesis, The George Washington University, Washington, DC, 1996.
7. V. Milanović, E. D. Bowen, N. H. Tea, J. S. Suehle, C. A. Zincke, M. Zaghloul, and M. Gaitan, Proceedings of International Mechanical Engineering Conference and Exhibition, Anaheim, CA, 1998.