Ultrafast laser-induced breakdown spectroscopy and application to real-time control of ultrafast laser micromachining process

Proceedings of the ASME Summer Heat Transfer Conference

Volumn 2003, Issue , 2003, Pages 53-61

  Tong, Tao ^a   Li, Jinggao ^a   Longtin, Jon P ^a  

^a Stony Brook University   (United States)

Author keywords

Laser induced breakdown spectroscopy (LIBS); Micromachining; Real time control; Ultrafast laser

Indexed keywords

ALGORITHMS; CONTINUUM MECHANICS; CORRELATION METHODS; FEEDBACK CONTROL; LASER ABLATION; MICROMACHINING; MICROSTRUCTURE; NEODYMIUM LASERS; REAL TIME SYSTEMS; SPECTROMETRY; SPECTROSCOPIC ANALYSIS; ULTRAFAST PHENOMENA;

LASER INDUCED BREAKDOWN SPECTROSCOPY (LIBS); REAL TIME CONTROL;

LASER APPLICATIONS;

EID: 1842640514     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/ht2003-47068     Document Type: Conference Paper

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