A micro-electro-mechanicalsystem-based thermal shear-stress sensor with self-frequency compensation

Measurement Science and Technology

Volumn 10, Issue 8, 1999, Pages 687-696

  Huang, J B ^a   Jiang, F K ^b   Tai, Y C ^b   Ho, C M ^c  

^a SARNOFF CORPORATION   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c California Institute of Technology   (United States)

Author keywords

Flow sensing; MEMS shear stress sensor; Micro machine technologies

Indexed keywords

FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; SENSITIVITY ANALYSIS; SHEAR STRESS; SUBSTRATES; TEMPERATURE MEASUREMENT; TURBULENT FLOW;

MICRO-THERMAL SENSORS; POLYSILICON SENSOR ELEMENTS; SHEAR-STRESS MICROSENSORS;

FLOW MEASUREMENT;

ELECTROMECHANICAL EQUIPMENT; SENSOR; SHEAR STRESS;

EID: 0032868431     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/8/303     Document Type: Article

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