Study of the structure and optical properties of nanocrystalline zirconium oxide thin films deposited at low temperatures

Journal of Physics D: Applied Physics

Volumn 37, Issue 12, 2004, Pages 1701-1705

  Zhao, Z W ^a   Tay, B K ^a   Huang, L ^a   Yu, G Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL DURABILITY; FILM STRUCTURE; SUBSTRATE TEMPERATURE;

ATOMIC FORCE MICROSCOPY; CATHODES; FRACTURE TOUGHNESS; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PERMITTIVITY; REFRACTIVE INDEX; SEMICONDUCTOR MATERIALS; STRENGTH OF MATERIALS; SURFACE ROUGHNESS; X RAY DIFFRACTION; ZIRCONIUM;

THIN FILMS;

EID: 3042543172     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/12/016     Document Type: Article

References (29)

1. Yang M M, Reith T M and Lin C J 2000 J. Vac. Sci. Technol. A 8 3925
2. Ghanashyam Krishna M, Narashima Rao K and Mohan S 1990 Appl. Phys. Lett. 57 551
3. Qi W J, Nieh R, Lee B H, Kang L G, Jeon Y and Lee J C 2000 Appl. Phys. Lett. 77 3269
4. Zhao Z W, Tay B K and Sheeja D 2003 Surf. Coat. Technol. 167 234
5. Zhao Z W, Tay B K, Lau S P and Xiao C Y 2003 J. Vac. Sci. Technol. A 21 906
6. Garcia G, Casado J, Libre J, Cifre J, Figulras A, Gali S and Bassas J 1997 Chem. Vap. Deposition 3 91
7. Chang J P and Lin Y S 2001 J. Appl. Phys. 90 2964
8. Chang J P, Lin Y S and Chu K 2001 J. Vac. Sci. Technol. B 19 1782
9. Ramamurthy S, Subramanian N S, Sarangarajan K and Santhi B 1998 Bull. Electrochem. 14 446
10. Khawaja E E, Bouamrane F, Hallak A B, Daous M A and Salim M A 1993 J. Vac. Sci. Technol. A 11 580
11. Matsuoka M, Isotani S, Chubaci J F D, Miyake S, Setsuhara Y, Ogata K and Kuratani N 2000 J. Appl. Phys. 88 3773
12. Gao P T, Meng L J, dos Santos M P, Teixeira V and Andritschky M 2000 Vacuum 56 143
13. Ben Amor S, Rogier B, Baud G, Jacquet M and Nardin M 1998 Mater. Sci. Eng. B 57 28
14. Koski Kholsa J and Juliet P 1999 Surf. Coat. Technol. 121 303
15. Edlou S M, Smajkiewicz A and Aljumaly G A 1993 Appl. Opt. 32 5601
16. Tay B K, Shi X and Flynn D I 1997 Surf. Eng. 13 213
17. Zhao Z W, Tay B K, Yu G Q and Lau S P 2003 J. Phys.: Condens. Matter 15 7707
18. Shi X, Tay B K, Tan H S, Zhong L, Tu Y Q and Silva S R P 1996 J. Appl. Phys. 79 7239
19. Shi X, Tay B K and Lau S P 2000 Int. J. Mod. Phys. B 14 136
20. Theiss W 2001 Scout Thin Film Analysis Software Handbook ed M Theiss (Aachen: Hard- and Software)
21. Scarel G, Ferrari S, Spiga S, Wiemer C, Tallrida G and Fanciulli M 2003 J. Vac. Sci. Technol. A 21 1359
22. Martin P J, Netterfield R P and Sainty W G 1984 J. Appl. Phys. 55 235
23. Anders A 2002 Vacuum 67 673
24. Cullity B D 1978 Elements of X-ray Diffraction 2nd edn (Reading, USA: Addison-Wesley) p 102
25. Gupta V and Mansingh A 1996 J. Appl. Phys. 80 1063
26. Mor J M and Agostinelli J A 1994 J. Vac. Sci. Technol. A 12 1439
27. Taue J (ed) 1971 Optical Properties of Solids ed F Abeles (Amsterdam: North-Holland)
28. Aarik J, Aidla A, Kiisler A, Uustare T and Sammelselg V 1997 Thin Solid Films 305 270
29. Radha Krishna B, Subramanyam T K, Srinivasulu Naidu B and Uthanna S 2000 Opt. Mater. 15 217