Hydrogen free tetrahedral carbon film preparation and tribological characterisation

Surface Engineering

Volumn 13, Issue 3, 1997, Pages 213-217

  Tay, B K ^a   Shi, X ^a   Flynn, D I ^a   Sun, Z ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DENSITY (SPECIFIC GRAVITY); DEPOSITION; FILM PREPARATION; FRICTION; HARDNESS; LOAD TESTING; SAPPHIRE; SILICON; STIFFNESS; SUBSTRATES; TRIBOLOGY;

FILTERED CATHODIC VACUUM ARC TECHNIQUE; ION ENERGY; NANOINDENTERS;

AMORPHOUS FILMS;

EID: 0030659303     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/sur.1997.13.3.213     Document Type: Article

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