Optical properties of filtered cathodic vacuum arc-deposited zirconium oxide thin films

Journal of Physics Condensed Matter

Volumn 15, Issue 45, 2003, Pages 7707-7715

  Zhao, Z W ^a   Tay, B K ^a   Yu, G Q ^a   Lau, S P ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; LIGHT INTERFERENCE; OPTICAL PROPERTIES; PLASMAS; QUARTZ; REFRACTIVE INDEX; STOICHIOMETRY; SUBSTRATES; THIN FILMS; VACUUM;

CATHODIC VACUUM; OXYGEN FLOW RATE;

ZIRCONIA;

EID: 0344897146     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/15/45/010     Document Type: Article

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