Cutting of polished single-crystal silicon by wire electrical discharge machining

Precision Engineering

Volumn 28, Issue 3, 2004, Pages 314-319

  Takino, Hideo ^a   Ichinohe, Toshimitsu ^a   Tanimoto, Katsunori ^a   Yamaguchi, Syuichi ^a   Nomura, Kazushi ^a   Kunieda, Masanori ^b  

^a NIKON CORPORATION   (Japan)

^b TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Mirror; Optics; Silicon; Surface; WEDM; Wire electrical discharge machining

Indexed keywords

CRACKS; ELECTRIC WIRE; MICROPROCESSOR CHIPS; OXIDATION; SILICON; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL);

HIGH QUALITY SURFACES; WEDM; WIRE ELECTRICAL DISCHARGE MACHINING;

ELECTRIC DISCHARGE MACHINING;

EID: 2942754292     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2003.12.002     Document Type: Article

References (20)

1. Leistner A.J., Giardini W.J. High-precision large-diameter single-crystal silicon spheres: their fabrication and measurements of sphericity. Proc. SPIE. 2536:1995;302-316.
2. Parr-Burman P.M., Shore P. Diamond turning of silicon optics. Proc. SPIE. 2775:1996;575-584.
3. Suzuki H., Kodera S., Nakasuji T., Ohta T., Syoji K. Study on aspherical polishing of single-crystal silicon lens. J. Jpn. Soc. Prec. Eng. 63(9):1997;1280-1284. [in Japanese].
4. Derst G., Handschuh H., Schmidt M., Werner K. Fabrication and metrology of high quality synchrotron mirrors in the sub-arcsec regime. Proc. SPIE. 3152:1997;51-58.
5. Yan J., Syoji K., Kuriyagawa T. Chip morphology of ultra-precision diamond turning of single-crystal silicon. J. Jpn. Soc. Prec. Eng. 65(7):1999;1008-1012. [in Japanese].
6. Jacoby M.T., Montgomery E.E., Fortini A.J., Goodman W.A. Design, fabrication, and testing of lightweight silicon mirrors. Proc. SPIE. 3786:1999;460-467.
7. Yan J., Syoji K., Kuriyagawa T. Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning. J. Jpn. Soc. Prec. Eng. 68(4):2000;561-565. [in Japanese].
8. Born D.K., Goodman W.A. An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single-crystal silicon optics. Prec. Eng. 25(4):2001;247-257.
9. Reynaerts D., Heeren P.H., Brussel H.V. Microstructuring of silicon by electro-discharge machining (EDM) - part I: theory. Sens. Actuators A. 60:1997;212-218.
10. Heeren P.H., Reynaerts D., Brussel H.V., Beuret C., Larsson O., Bertholds A. Microstructuring of silicon by electro-discharge machining (EDM) - part II: applications. Sens. Actuators A. 61:1997;379-386.
11. Reynaerts D., Meeusen W., Brussel H.V. Machining of three-dimensional microstructures in silicon by EDM. Sens. Actuators A. 67:1998;159-165.
12. Song X., Reynaerts D., Meeusen W., Brussel H.V. A study on the elimination of micro-cracks in a sparked silicon surface. Sens. Actuators A. 92:2001;286-291.
13. Okada A, Uno Y, Okamoto Y. A new slicing method of monocrystalline silicon ingot by wire EDM. In: Proceedings of the 12th International Symposium for Electro Machining (ISEM); 1998. p. 417-24.
14. Uno Y, Okada A, Okamoto Y, Hirano T. High performance slicing method of monocrystalline silicon ingot by wire EDM. In: Proceedings of the 10th International Conference on Precision Engineering (ICPE); 2001. p. 219-23.
15. Kunieda M., Ojima S. Improvement of EDM efficiency of silicon single-crystal through ohmic constant. Prec. Eng. 24(3):2000;185-190.
16. Komatsuda H. Novel illumination system of EUVL. Proc. SPIE. 3997:2000;765-776.
17. Takino H., Kobayashi T., Shibata N., Kuki M., Itoh A., Komatsuda H. Fabrication of a complex-shaped mirror for an extreme ultraviolet lithography illumination system. Opt. Eng. 42(9):2003;2676-2682.
18. Chan SL, Yan BH, Huang FY. The material removal mechanism of Ti-6Al-4V with kerosene and distilled water dielectrics. In: Proceedings of the International Conference of Precession Engineering, 1997, Taiwan; 1997. p. 581-5.
19. Yu Z., Kunieda M. Study on Material Removal Rate of EDM in Deionized Water. J. Jpn. Soc. Elect.-Mach. Eng. 33(72):1999;28-36. [in Japanese].
20. Furudate C, Kunieda M. High-quality cutting of mirror finished parts by dry wire electrical discharge machining. In: Proceedings of Annual Meeting of the Japan Society of Electrical Machining Engineers; 2002. p. 9-12 [in Japanese].