Fabrication of a complex-shaped mirror for an extreme ultraviolet lithography illumination system

Optical Engineering

Volumn 42, Issue 9, 2003, Pages 2676-2682

  Takino, Hideo ^a   Kobayashi, Teruki ^a   Shibata, Norio ^a   Kuki, Masaaki ^a   Itoh, Akinori ^a   Komatsuda, Hideki ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

Extreme ultraviolet lithography; Fabrication; Fly eye; Illumination; Integrator; Metal; Mirror; Optics

Indexed keywords

ELECTROLESS PLATING; FABRICATION; LIGHTING; LITHOGRAPHY; NICKEL PLATING; REFLECTION; SURFACE ROUGHNESS; SURFACES; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET LITHOGRAPHY; FLY-EYE MIRROR; PEAK-TO-VALLEY SURFACE ACCURACY;

MIRRORS;

EID: 0142059781     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1591797     Document Type: Article

References (8)

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