Microstructuring of silicon by electro-discharge machining (edm) -part ii: Applications

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 379-386

  Heeren, Paul Henri 's ^a   Reynaerts, Dominiek ^a   Van Brussel, Hendrik ^a   Beuret, Cynthia ^b   Larsson, Olle ^c   Bertholds, Axel ^d  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^c ACREO AB   (Sweden)

^d AGIE SA   (Switzerland)

Author keywords

Electro discharge machining; Microelectromechanical system (MEMS); Silicon micromachining

Indexed keywords

MICROMACHINING; SEMICONDUCTING SILICON;

ELECTRODISCHARGE MACHINING (EDM);

MICROELECTROMECHANICAL DEVICES;

EID: 0031167757     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80293-2     Document Type: Article

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