Study on aspherical surface polishing of single crystal silicon lens

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 63, Issue 9, 1997, Pages 1280-1284

  Suzuki, Hirofumi ^a   Kodera, Sunao ^a   Nakasuji, Tomoaki ^a   Ohta, Tsutomu ^a   Syoji, Katsuo ^a  

^a NONE

Author keywords

Aspherical surface polishing; Colloidal silica; Computer controlled polishing; Infrared lens of single crystal silicon; Small rotating tool

Indexed keywords

COMPUTER CONTROL; POLISHING; SILICA; SILICON; SINGLE CRYSTALS;

ASPHERICAL SURFACE POLISHING; SINGLE CRYSTAL SILICON LENS;

LENSES;

EID: 0031219698     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.63.1280     Document Type: Article

References (7)

1. T.Nakasuji, S.Kodera, S.Hara, H.Matsunaga and N.Ikawa : Diamond Turning of Brittle Materials for Optical Component, Ann. CIRP, 39, 1,(1990) 89.