An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single-crystal silicon optics

Precision Engineering

Volumn 25, Issue 4, 2001, Pages 247-257

  Born, D Krulewich ^a   Goodman, W A ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b SCHAFER CORPORATION   (United States)

Author keywords

Diamond turning; Silicon machining

Indexed keywords

CUTTING FLUIDS; DIAMOND CUTTING TOOLS; MACHINE TOOLS; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; SILICON; SINGLE CRYSTALS; WEAR OF MATERIALS;

MACHINING PARAMETERS; TOOL EDGE RECESSION;

TURNING;

EID: 0035479735     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(00)00069-6     Document Type: Article

References (6)

1. Ductile-regime machining of germanium and silicon
2. Ductile-regime machining model for diamond turning of brittle materials
3. An empirical survey on the influence of machining parameters in diamond turning of large single crystal silicon optics