A study on the elimination of micro-cracks in a sparked silicon surface

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 286-291

  Song, X ^a   Reynaerts, D ^a   Meeusen, W ^a   Van Brussel, H ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Micro crack; Micro EDM; Silicon micro machining; Spark erosion

Indexed keywords

CAPACITANCE; CAPACITORS; CRYSTAL ORIENTATION; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ETCHING; FRACTURE TOUGHNESS; MICROCRACKS; SILICON WAFERS;

CHEMICAL ETCHING; CRACK FORMATION; MICRO ELECTRO DISCHARGE MACHINING; SILICON MICRO-MACHINING; SPARK EROSION; SPARKING ENERGY;

MICROMACHINING;

EID: 0035425914     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00585-4     Document Type: Article

References (8)

1. Current trends in nonconventional material removal processes
2. Micro-structuring of silicon by electro discharge machining (EDM). Part I. Theory
3. Self-aligned machining and assembly of high aspect ratio micro-parts into silicon
4. Micro-electro discharge machining and its application
5. Three-dimensional silicon micro-components manufactured by micro-electro discharge machining
6. Novel pneumatic actuator system realized by micro-electro discharge machining
7. Fractal fracture of single crystal silicon