Low-energy grazing-angle argon-ion irradiation of silicon: A viable option for cleaning?

Applied Physics Letters

Volumn 76, Issue 14, 2000, Pages 1887-1889

  Zalm, P C ^a,b   Van Den Berg, J A ^a   Van Berkum, J G M ^b   Bailey, P ^c   Noakes, T C Q ^c  

^a UNIVERSITY OF SALFORD   (United Kingdom)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

^c DARESBURY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0142137403     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126201     Document Type: Article

References (12)

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