Smoothing thin films with gas-cluster ion beams

Materials Research Society Symposium - Proceedings

Volumn 614, Issue , 2001, Pages F1031-F1036

  Fenner, D B ^a   Hautala, J ^a   Allen, L P ^a   Greer, J A ^a   Skinner, W J ^a   Budnick, J I ^b  

^a Epion Corporation   (United States)

^b UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL MECHANICAL POLISHING; GIANT MAGNETORESISTANCE; ION BEAMS; MAGNETIC THIN FILM DEVICES; MULTILAYERS; SPUTTERING; SURFACE ROUGHNESS;

GAS-CLUSTER ION-BEAMS (GCIB);

MAGNETIC THIN FILMS;

EID: 0035036531     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/PROC-614-F10.3.1     Document Type: Article

References (0)