Surface smoothing by energetic cluster impact

Journal of Applied Physics

Volumn 90, Issue 7, 2001, Pages 3226-3231

  Rattunde, Oliver ^a   Moseler, Michael ^a   Häfele, Andreas ^a   Kraft, Jürgen ^a   Rieser, Daniel ^a   Haberland, Hellmut ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035476383     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1398067     Document Type: Article

References (20)

1. A. L. Barabasi, and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995).
2. Ion Beam Assisted Film Growth, edited by T. Itoh (Elsevier, Amsterdam, 1989).
3. Atomic and Ionic Collisions in Solids and at Surfaces, edited by R. Smith (Cambridge University Press, Cambridge. 1997).
4. P. Sigmund, Phys. Rev. 184, 383 (1969).
5. H. Haberland, M. Karrais, M. Mall, and Y. Thurner, J. Vac. Sci. Technol. A 10, 3266 (1992).
6. H. Haberland, M. Moseler, Y. Qiang, O. Rattunde, T. Reiners, and Y. Thurner, Surf. Rev. Lett. 3, 887 (1996).
7. Y. Qiang, Y. Thurner, T. Reiners, O. Rattunde, and H. Haberland, Surf. Coat. Technol. 100-101, 27 (1998).
8. J. Kraft, Ph.D., Freiburg 2000, unpublished, manuscript in preparation. The present version of the apparatus is described under http://www.fmf.uni-freiburg.de/cluster/haberland.html and http:// www.oaresearch.co.uk/clusters.htm
9. W. Brown and M. Sosnowski, Nucl. Instrum. Methods Phys. Res. B 102, 305 (1995).
10. M. Akizuki, M. Harada, Y. Miyai, A. Doi, T. Yamaguchi, J. Matsuo, G. H. Takaoka, C. E. Ascheron, and I. Yamada, Surf. Rev. Lett. 1, 891 (1996).
11. P. R. W. Henkes and R. Klingelhöfer, Vacuum 39, 541 (1989).
12. I. Yamada, Eur. Phys. J. D 9, 55 (1999).
13. J. Gspann, Surf. Rev. Lett. 3, 897 (1996).
14. H. Haberland, Z. Insepov, and M. Moseler, Phys. Rev. B 51, 11061 (1995).
15. M. Moseler, J. Nordiek, and H. Haberland, Phys. Rev. B 56, 15439 (1997).
16. M. Moseler, O. Rattunde, J. Nordiek, and H. Haberland, Nucl. Instrum. Methods Phys. Res. B 164, 522 (2000).
17. M. Moseler, O. Rattunde, J. Nordiek, and H. Haberland, Comput. Mater. Sci. 10, 452 (1998).
18. S. F. Edwards and D. R. Wilkinson, Proc. R. Soc. London, Ser. A 381, 17 (1982).
19. J. Krug, Adv. Phys. 46, 139 (1996).
20. See http://www.epion.com