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Surface and Coatings Technology

Volumn 200, Issue 7, 2005, Pages 2214-2222

Evaluation of plasma deposited fluorocarbon films using experimental design methodology

(2) Wei, Ta Chin a Liu, Chi Hung a

a CHUNG YUAN CHRISTIAN UNIVERSITY (Taiwan)

Author keywords

Design of experiment; Fluorocarbon; PACVD; Radio frequency; Refractive index; Response surface

Indexed keywords

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYNOMIALS; REFRACTIVE INDEX; REGRESSION ANALYSIS; STATISTICAL METHODS; SUBSTRATES; THERMODYNAMIC STABILITY; THIN FILMS;

DESIGN OF EXPERIMENT; RADIO FREQUENCY; RESPONSE SURFACE;

FLUOROCARBONS;

COATING;

EID: 29244489540 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.04.028 Document Type: Article

Times cited : (23)

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