Self-assembled tungsten nanocrystals in high- k dielectric for nonvolatile memory application

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2278-2283

  Samanta, S K ^a   Tan, Zerlinda Y L ^a   Yoo, Won Jong ^a   Samudra, Ganesh ^a   Lee, Sungjoo ^a   Bera, L K ^b   Balasubramanian, N ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; DEPOSITION; ELECTRON DIFFRACTION; NONVOLATILE STORAGE; RAPID THERMAL ANNEALING; SELF ASSEMBLY; THIN FILMS; TRANSISTORS; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

DEEP QUANTUM WELL; HAFNIUM ALUMINATE (HFA10); NANOCRYSTALS;

NANOSTRUCTURED MATERIALS;

EID: 29044444539     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2083930     Document Type: Article

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