Self-assembly of Ni nanocrystals on HfO2 and N -assisted Ni confinement for nonvolatile memory application

Applied Physics Letters

Volumn 86, Issue 1, 2005, Pages

  Tan, Zerlinda ^a   Samanta, S K ^a   Yoo, Won Jong ^a   Lee, Sungjoo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CMOS INTEGRATED CIRCUITS; HAFNIUM COMPOUNDS; LEAKAGE CURRENTS; NICKEL; NITRIDING; NONVOLATILE STORAGE; PERTURBATION TECHNIQUES; POLYSILICON; SCANNING ELECTRON MICROSCOPY;

DISCRETE CHARGE STORAGE; GATE PATTERNING; METAL GATE ELECTRODES; NANOCRYSTALS (NC);

NANOSTRUCTURED MATERIALS;

EID: 13544264528     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1846952     Document Type: Article

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