Investigation of the crystallization mechanisms in indium molybdenum oxide films by vacuum annealing

Journal of Materials Research

Volumn 20, Issue 8, 2005, Pages 2030-2037

  Sun, Shi Yao ^a   Huang, Jow Lay ^a   Lii, Ding Fwu ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b CHENG SHIU UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARRIER MOBILITY; CRYSTALLIZATION; FILMS; PLASMA DENSITY; STRAIN; SUBSTRATES; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

GLASS SUBSTRATES; INDIUM MOLYBDENUM OXIDE (IMO) FILMS; VACUUM ANNEALING;

INDIUM COMPOUNDS;

EID: 28844465249     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0248     Document Type: Article

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