Structural studies of ITO thin films with the Rietveld method

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 277-281

  Quaas, M ^a   Eggs, C ^a,b   Wulff, H ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b University of Minnesota   (United States)

Author keywords

Grazing incidence X ray diffractometry (GIXRD); Inidium tin oxide (ITO); Rietveld method; Structure model

Indexed keywords

LATTICE CONSTANTS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; THIN FILMS; X RAY CRYSTALLOGRAPHY;

GRAZING INCIDENCE X RAY DIFFRACTOMETRY (GIXRD); RIETVELD METHOD;

SEMICONDUCTING FILMS;

EID: 0032476282     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01064-5     Document Type: Article

References (14)

1. G. Franck, H. Köstlin, Appl. Phys. A 27 (1982) 197.
2. P. Parent, H. Dexpert, G. Tourillon, J.M. Grimal, J. Electrochem. Soc. 139 (14) (1992) 276.
3. M. Marezio, Acta Cryst. 20 (1966) 723.
4. T. Takayama, Y. Matsumoto, Adv. X-ray Anal. 33 (1990) 91.
5. W. Pitschke, Mater. Sci. Forum 228-231 (1996) 178.
6. H. Wulff, C. Eggs, J. Vac. Sci. Technol. A 15 (1997) 2938.
7. A.R. Stokes, Proc. Phys. Soc. 61 (1948) 382.
8. J. Schneider, Acta Cryst. A 43 (1987) 295.
9. US Department of Commerce, National Institute of Standards&Technology, Gaithersburg, MD 20899, USA.
10. R.D. Shannon, Act. Cryst. A 32 (1976) 751.
11. B.E. Warren, Prog. Metal Phys. 9 (1969) 147.
12. P. Klimanek, Freiberger Forschungshefte B 265 (1988) 76.
13. P. Klimanek, Mater. Sci. Forum 79-82 (1991) 73.
14. P. Klimanek, in: J. Hasek (Ed.), X-ray and Neutron Structure Analysis in Material Research, Plenum Press, New York, 1989, p. 125.