Highly transparent and conductive ZnO-In2O3 thin films prepared by d.c. magnetron sputtering

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 1-5

  Minami, Tadatsugu ^a   Kakumu, Toshikazu ^a   Takeda, Yoshihiro ^a   Takata, Shinzo ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Magnetron sputtering; Metal oxide; Transparent conducting oxide; Transparent electrode

Indexed keywords

CARRIER CONCENTRATION; COMPOSITION EFFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; ENERGY GAP; ETCHING; FILM PREPARATION; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SEMICONDUCTING INDIUM COMPOUNDS; THIN FILMS; TRANSPARENCY; ZINC OXIDE;

METAL OXIDES; SHEET RESISTANCE; TRANSPARENT ELECTRODES;

CONDUCTIVE FILMS;

EID: 0004975261     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09094-3     Document Type: Article

References (17)

1. H. Enoki, T. Nakayama and J. Echigoya, Phys. Status Solidi A, 129 (1992) 181.
2. H. Un'no, N. Hikuma, T. Omata, N. Ueda, T. Hashimoto and H. Kawazoe, Jpn. J. Appl. Phys., 32 (1993) L1260.
3. T. Minami, H. Sonohara, S. Takata and H. Sato, Jpn. J. Appl. Phys., 33 (1994) L1693.
4. J.M. Philips, J. Kwo, G.A. Thomas, S.A. Carter, R.J. Cava, S.Y. Hou, J.J. Krajewski, J.H. Marshall, W.F. Peck, D.H. Rapkine and R.B. van Dover, Appl. Phys. Lett., 65 (1994) 115.
5. K. Yanagawa, Y. Ohki, T. Omata, H. Hosono, N. Ueda and H. Kawazoe, Appl. Phys. Lett., 65 (1994) 406.
6. T. Minami, H. Sonohara, T. Kakumu and S. Takata, Jpn. J. Appl. Phys., 34 (1995) L971.
7. T. Minami, S. Takata, T. Kakumu and H. Sonohara, Thin Solid Films, 270 (1995) 22.
8. T. Minami, T. Kakumu and S. Takata, J. Vac. Sci. Technol. A, 14 (1996) 1689.
9. T. Minami, S. Takata, H. Sato and H. Sonohara, J. Vac. Sci. Technol. A, 13 (1995) 1095.
10. T. Minami, T. Kakumu and S. Takata, J. Vac. Sci. Technol. A, 14 (1996) 1704.
11. T. Minami, H. Sato, H. Imamoto and S. Takata, Jpn. J. Appl. Phys., 31 (1992) L257.
12. I. Hamberg and C.G. Granqvist, J. Appl. Phys., 60 (1986) R123.
13. T. Minami, H. Sato, K. Ohashi, T. Tomofuji and S. Takata, J. Cryst. Growth, 177 (1992) 370.
14. T. Minami, H. Sato, H. Nanto and S. Takata, Jpn. J. Appl. Phys., 24 (1985) L781.
15. J.B. Webb, Thin Solid Films, 136 (1986) 135.
16. T. Minami, H. Nanto, H. Sato and S. Takata, Thin Solid Films, 164 (1988) 275.
17. S. Ishibashi, Y. Higuchi, Y. Ota and K. Nakamura, J. Vac. Sci. Technol. A, 8 (1990) 1403.