Chemical and thin-film strategies for new transparent conducting oxides

MRS Bulletin

Volumn 25, Issue 8, 2000, Pages 45-51

  Freeman, A J ^a   Poeppelmeier, K R ^a   Mason, T O ^a   Chang, R P H ^a   Marks, T J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CONDUCTIVE MATERIALS; ELECTRIC PROPERTIES; ELECTRONIC STRUCTURE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL PROPERTIES; PHASE COMPOSITION; SEMICONDUCTING ZINC COMPOUNDS; SOLID SOLUTIONS; THIN FILMS;

CHARGE TRANSPORT; QUINTINARY OXIDE SYSTEM; TRANSPARENT CONDUCTORS;

OXIDES;

EID: 0034246944     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2000.150     Document Type: Article

References (42)

1. R.J. Cava, J.M. Phillips, J. Kwo, G.A. Thomas, R.B. van Dover, S.A. Carter, J.J. Krajewski, W.F. Peck, Jr., J.H. Marshall, and D.H. Rapkine, Appl. Phys. Lett. 64 (1994) p. 2071.
2. J.M. Phillips, R.J. Cava, G.A. Thomas, S.A. Carter, J. Kwo, T. Siegrist, J.J. Krajewski, J.H. Marshall, W.F. Peck Jr., and D.H. Rapkine, Appl. Phys. Lett. 67 (1995) p. 2246.
3. D.D. Edwards, "Phase Relations, Crystal Structures, and Electrical Properties of Select Oxides in the Gallium-Indium-Tin-Oxide System," PhD thesis, Northwestern University, 1997.
4. G.B. Palmer, "Phase Relations and Physical Properties of New Transparent Conductors in the (Indium, Gallium)-Tin-Zinc Oxide Systems," PhD thesis, Northwestern University, 1999.
5. T. Moriga, D.R. Kammler, T.O. Mason, G.B. Palmer, and K.R. Poeppelmeier, J. Am. Ceram. Soc. 82 (1999) p. 2705.
6. D.R. Kammler (unpublished manuscript).
7. D.D. Edwards, T.O. Mason, F. Goutenoire, and K.R. Poeppelmeier, Appl. Phys. Lett. 70 (1997) p. 1706.
8. D.D. Edwards, T.O. Mason, W. Sinkler, L.D. Marks, F. Goutenoire, and K.R. Poeppelmeier, J. Solid State Chem. 140 (1998) p. 242.
9. M. Nakamura, N. Kimizuka, and T. Mohri, J. Solid State Chem. 93 (1991) p. 298.
10. T. Moriga, D.D. Edwards, T.O. Mason, G.B. Palmer, K.R. Poeppelmeier, J.L. Schindler, C.R. Kannewurf, and I. Nakabayashi, J. Am. Ceram. Soc. 81 (1998) p. 1310.
11. C. Li, Y. Bando, M. Nakamura, and N. Kimizuka, Jpn. Soc. Electron Microsc. 46 (1997) p. 119.
12. G.B. Palmer, K.R. Poeppelmeier, and T.O. Mason, Chem. Mater. 9 (1997) p. 3121.
13. D.R. Kammler, T.O. Mason, and K.R. Poeppelmeier, Chem. Mater. (2000) in press.
14. R.D. Shannon, J.L. Gillson, and R.J. Bouchard, J. Phys. Chem. Solids 38 (1977) p. 877.
15. G.B. Palmer, K.R. Poeppelmeier, and T.O. Mason, J. Solid State Chem. 134 (1997) p. 192.
16. X. Wu, T.J. Coutts, and W.P. Mulligan, J. Vac. Sci. Technol., A 15 (1997) p. 1057.
17. C.M. Cardile, A.J. Koplick, R. McPherson, and B.O. West, J. Mater. Sci. Lett. 8 (1989) p. 370.
18. T. Stapinski, E. Japa, and J. Zukrowski, Phys. Status Solidi A 103 (1987) p. K93.
19. G. Frank and H. Kostlin, Appl. Phys. A 27 (1982) p. 197.
20. J.-H. Hwang, D.D. Edwards, D.R. Kammler, and T.O. Mason, Solid State Ionics 129 (2000) p. 135.
21. G. Gonzalez, J. Cohen, J.-H. Hwang, T. Mason, J. Hodges, and J. Jorgensen, "Defect Structures of Indium Tin Oxide and Its Relationship to Conductivity," in Proc. Int. Conf. Mass and Charge Transport in Inorganic Materials, edited by P. Vincenzini (Techna Publishers, Faenza, Italy, 2000) in press.
22. R. Dieckmann and H. Schmalzried, Phys. Chem. 81 (1977) p. 414.
23. G. Haacke, W.E. Mealmaker, and L.A. Siegel, Thin Solid Films 55 (1978) p. 67.
24. O.N. Mryasov and A.J. Freeman, Phys. Rev. B (submitted for publication).
25. X.Y. Huang, R. Asahi, K.-T. Park, and A.J. Freeman (unpublished manuscript).
26. J.A. Belot, R.J. McNeely, A. Wang, C.J. Reedy, T.J. Marks, G.P.A. Yap, and A.L. Rheingold, J. Mater. Res. 14 (1999) p. 15.
27. J.A. Belot, A. Wang, R.J. McNeely, L. Liable-Sands, A.L. Rheingold, and T.J. Marks, Chem. Vap. Depos. 5 (1999) p. 65.
28. D.A. Neumayer, J.A. Belot, R.L. Feezel, C.J. Reedy, C.L. Stern, T.J. Marks, L.M. Liable-Sands, and A.L. Rheingold, Inorg. Chem. 37 (1998) p. 5625.
29. J.A. Belot, D.A. Neumayer, C.J. Reedy, D.B. Studebaker, B.J. Hinds, C.L. Stern, and T.J. Marks, Chem. Mater. 9 (1997) p. 1638.
30. A. Wang, S.C. Cheng, M.P. Chudzik, T.J. Marks, R.P.H. Chang, and C.R. Kannewurf, Appl. Phys. Lett. 73 (1998) p. 327.
31. A. Wang, S.C. Cheng, J.A. Belot, R.J. McNeely, J. Cheng, B. Marcordes, T.J. Marks, J.Y. Dai, R.P.H. Chang, J.L. Schindler, M.P. Chudzik, and C.R. Kannewurf, in Chemical Aspects of Electronic Ceramics Processing, edited by P.N. Kumta, A.F. Hepp, D.B. Beach, B. Arkles, and J.J. Sullivan (Mater. Res. Soc. Symp. Proc. 495, Warrendale, PA, 1998) p. 3.
32. A. Wang, N.L. Edleman, J.R. Babcock, T.J. Marks, M.A. Lane, P.W. Brazis, and C.R. Kannewurf, Mater. Res. Soc. Symp. Series in press.
33. J.R. Babcock, N.L. Edleman, A. Wang, C.L. Stern, and T.J. Marks, Adv. Mater. CVD (2000) in press.
34. Y. Van, S.J. Pennycook, J. Dai, R.P.H. Chang, A. Wang, and T.J. Marks, Appl. Phys. Lett. 73 (1998) p. 2585.
35. A. Wang, N.L. Edleman, T.J. Marks, M.A. Lane, P.W. Brazis, and C.R. Kannewurf, submitted for publication.
36. T. Minami, T. Kakumu, K. Shimokawa, and S. Takata, Thin Solid Films 317 (1-2) (1998) p. 318.
37. B.E. Sernelius, K.-F. Berggren, Z.-C. Jin, I. Hamberg, and C.G. Granqvist, Phys. Rev. B 37 (1988) p. 244.
38. E. Burstein, Phys. Rev. 93 (1954) p. 632.
39. T. Minami, T. Kakumu, and S. Takata, J. Vac. Sci. Technol., A 14 (1996) p. 1704.
40. T. Minami, Y. Takeda, T. Kakumu, S. Takata, and I. Fukuda, J. Vac. Sci. Technol., A 15 (1997) p. 958.
41. J.R. Babcock, A. Wang, N.L. Edleman, D.D. Benson, A.W. Metz, M.V. Metz, and T.J. Marks, "Development and Implementation of New Volatile Cd and Zn Precursors for the Growth of Transparent Conducting Oxide Thin Films via MOCVD," presented at the Spring 2000 Materials Research Society Meeting, San Francisco, CA, April 27, 2000.
42. A. Wang, J.R. Babcock, N.L. Edleman, M.A. Lane, S. Yang, C.R. Kannewurf, A.J. Freeman, and T.J. Marks (manuscript in preparation).