Molybdenum-doped indium oxide transparent conductive thin films

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 1, 2002, Pages 288-290

  Meng, Yang ^a   Yang, Xi liang ^a   Chen, Hua xian ^a   Shen, Jie ^a   Jiang, Yi ming ^a   Zhang, Zhuang jian ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; ELECTRIC CONDUCTIVITY; ELECTRON MOBILITY; EVAPORATION; FILM PREPARATION; MOLYBDENUM; OPACITY; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DOPING; TRANSPARENCY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MOLYBDENUM DOPED INDIUM OXIDE; SPECTRAL TRANSMITTANCE; THERMAL REACTIVE EVAPORATION;

CONDUCTIVE FILMS;

EID: 0036165474     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1421595     Document Type: Article

References (16)