Behavior of implanted hydrogen in thermally stimulated blistering in silicon

Radiation Effects and Defects in Solids

Volumn 158, Issue 11-12, 2003, Pages 771-781

  Aleksandrov, P A ^a   Baranova, E K ^a   Baranova, I V ^a   Budaragin, V V ^a   Litvinov, V L ^a  

^a KURCHATOV INSTITUTE   (Russian Federation)

Author keywords

Blistering; Hydrogen; Implantation; Interference spectroscopy; Ion cut; Silicon

Indexed keywords

AGGLOMERATION; DEFORMATION; ELASTICITY; HEAT TREATMENT;

BLISTERS; GASEOUS HYDROGEN; ION IMPLANTED HYDROGEN;

HYDROGEN;

EID: 28344452983     PISSN: 10420150     EISSN: 10294953     Source Type: Journal    
DOI: 10.1080/1042015021000043854     Document Type: Article

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