Selective growth of nanometre scale structures with high resolution using thermal energy in AFM lithography

Nanotechnology

Volumn 16, Issue 12, 2005, Pages 3137-3141

  Lee, Sunwoo ^a,b   Lee, Haiwon ^a,b   Park, Byung Jae ^c   Yeom, Geun Young ^c  

^a Hanyang University   (South Korea)

^b National Program for Tera Level Devices   (South Korea)

^c Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DRY ETCHING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; THIN FILMS;

DIRECTIONAL DIFFUSION; ELECTRON TRANSFER; NANOPATTERNS; THERMAL ENERGY;

GROWTH (MATERIALS);

EID: 27944487442     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/16/12/068     Document Type: Article

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