Peculiarities of an anomalous electronic current during atomic force microscopy assisted nanolithography on n-type silicon

Nanotechnology

Volumn 14, Issue 7, 2003, Pages 716-721

  Lyuksyutov, Sergei F ^a   Paramonov, Pavel B ^a   Dolog, Ivan ^a   Ralich, Robert M ^a  

^a UNIVERSITY OF AKRON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC BREAKDOWN; ELECTRIC CURRENTS; ELECTRONS; IONIC CONDUCTION; OXIDES; SEMICONDUCTING SILICON; SURFACES; WATER;

ANOMALOUS ELECTRONIC CURRENT; OXIDE NANOLITHOGRAPHY;

NANOTECHNOLOGY;

EID: 0041995350     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/14/7/305     Document Type: Article

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