Analysis of a Surface Encoder in Wave Optics

Key Engineering Materials

Volumn 257-258, Issue , 2004, Pages 219-224

  Watanabe, Y ^a   Gao, W ^a   Shimizu, H ^a   Kiyono, S ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Machine Tool Carriage; Position Measurement; Surface Encoder; Wave Optics

Indexed keywords

COMPUTER SIMULATION; ELECTROMAGNETIC WAVE DIFFRACTION; GEOMETRICAL OPTICS; LIGHT INTERFERENCE; LIGHT POLARIZATION; MACHINE TOOLS; OPTICAL BEAM SPLITTERS; PHOTODETECTORS; POSITION MEASUREMENT;

MACHINE TOOL CARRIAGE; SURFACE ENCODERS; WAVE OPTICS;

SURFACE PHENOMENA;

EID: 17644443158     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.257-258.219     Document Type: Article

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