Development of a unique, high precision linear motor integrated air slide table, and its application to laser beam writers

Optical Review

Volumn 6, Issue 1, 1999, Pages 88-92

  Onda, Hajime ^a  

^a NTN CORPORATION   (Japan)

Author keywords

Air slide table; Diffractive optical element; Laser writer; Linear motor; Patterning; Precise positioning

Indexed keywords

EID: 0033247498     PISSN: 13406000     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10043-999-0088-2     Document Type: Article

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