Spectroscopic ellipsometry characterization of amorphous aluminum nitride and indium nitride thin films

Physica Status Solidi C: Conferences

Volumn 2, Issue 7, 2005, Pages 2821-2827

  Khoshman, Jebreel M ^a   Kordesch, Martin E ^a  

^a OHIO UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CRYSTALLIZATION; ELLIPSOMETRY; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OPTICAL COATINGS; SPECTROSCOPIC ANALYSIS; X RAY DIFFRACTION ANALYSIS;

ELLIPSOMETRIC SPECTRA; INDIUM NITRIDE; REACTIVE MAGNETRON SPUTTERING; SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 27344443693     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200461331     Document Type: Conference Paper

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