Ellipsometry study of InN thin films prepared by magnetron sputtering

Journal of Materials Science: Materials in Electronics

Volumn 12, Issue 12, 2001, Pages 725-728

  Li, F ^c   Mo, D ^a   Cao, C B ^b   Zhang, Y L ^b   Chan, H L W ^b   Choy, C L ^b  

^a SUN YAT SEN UNIVERSITY   (China)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CRYSTAL STRUCTURE; ELLIPSOMETRY; MAGNETRON SPUTTERING; SEMICONDUCTING INDIUM COMPOUNDS; SUBSTRATES; THICKNESS MEASUREMENT;

RADIO FREQUENCY (RF) MAGNETRON SPUTTERING;

THIN FILMS;

EID: 0035677004     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1012992810476     Document Type: Article

References (7)