Spectroellipsometric characterization of materials for multilayer coatings

Applied Surface Science

Volumn 175-176, Issue , 2001, Pages 276-280

  Postava, K ^a   Aoyama, M ^a   Yamaguchi, T ^a   Oda, H ^b  

^a SHIZUOKA UNIVERSITY   (Japan)

^b Itoh Optical Industrial Co Ltd   (Japan)

Author keywords

Optical coatings; Optical functions; Refractive index; Spectroscopic ellipsometry

Indexed keywords

ELLIPSOMETRY; OPTICAL GLASS; REFRACTIVE INDEX; SILICA; SPECTROSCOPIC ANALYSIS; SUBSTRATES; TANTALUM COMPOUNDS; TITANIUM DIOXIDE;

TAUC-LORENTZ MODEL;

OPTICAL COATINGS;

EID: 0035873637     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00163-5     Document Type: Article

References (17)

1. Battaglin C., Caccavale F., Menelle A., Montecchi M., Nichelatti E., Nicoletti F., Potato P. Thin Solid Films. 351:1999;176.
2. Vergöhl M., Malkomes N., Staedler T., Matthée T., Richter U. Thin Solid Films. 351:1999;42.
3. Bhattacharyya D., Sahoo N.K., Thakur S., Das N.C. Thin Solid Films. 360:2000;96.
4. I. Ohlídal, D. Franta, Ellipsometry of thin film systems, in: E. Wolf (Ed.), Progress in Optics, North-Holland, Amsterdam, 2001, Vol. 41.
5. Franta D., Ohilídal I. Surface and Interface Anal. 30:2000;574.
6. Yamaguchi T., Tamura H., Taga S., Tsuchiya S. Appl. Optics. 25:1986;2703.
7. G.E. Jellison Jr., F.A. Modine, Appl. Phys. Lett. 69 (1996) 371, 2137.
8. Postava K., Sueki H., Aoyama M., Yamaguchi T., Ino Ch., Igasaki Y., Horie M. J. Appl. Phys. 87:2000;7820.
9. P.R. Bevington, Data Reduction and Error Analysis for the Physical Sciences, McGraw-Hill, New York, 1969.
10. W.H. Press, S.A. Teukolsky, W.T. Vetterling, B.P. Flannery, Numerical Recipes in C - The Art of Scientific Computing, Cambridge University Press, Cambridge, 1997.
11. Selhofer H., Müller R. Thin Solid Films. 351:1999;180.
12. Todríguez J., Gómez M., Ederth J., Niklasson G.A., Granqvist C.G. Thin Solid Films. 365:2000;119.
13. Roussel Ph.J., Vanhellemont J., Maes H.E. Thin Solid Films. 234:1993;423.
14. Bendavid A., Martin P.J., Jamting Å., Takikawa H. Thin Solid Films. 355-356:1999;6.
15. Järrendahl K., Arwin H. Thin Solid Films. 313-314:1998;114.
16. Jellison G.E. Jr. J. Appl. Phys. 69:1991;7627.
17. H. Piller, Silicon (amorphous) (a-Si), in: E.D. Palik (Ed.), Handbook of Optical Constants of Solids, Academic Press, New York, 1998.