Real-time assessment of overlayer removal on GaN, AIN, and AIGaN surfaces using spectroscopic ellipsometry

Applied Physics Letters

Volumn 69, Issue 14, 1996, Pages 2065-2067

  Edwards, N V ^a   Bremser, M D ^a   Weeks Jr , T W ^a   Kern, R S ^a   Davis, R F ^a   Aspnes, D E ^b  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000498927     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116881     Document Type: Article

References (14)

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