Electrolysis of water: An actuation principle for MEMS with a big opportunity

Mechatronics

Volumn 10, Issue 4, 2000, Pages 571-581

  Neagu, Cristina ^a   Jansen, Henri ^a   Gardeniers, Han ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROCHEMICAL ELECTRODES; ELECTROLYSIS; LEAKAGE (FLUID); PRESSURE;

ELECTROCHEMICAL CELLS; PRESSURE SENSORS; WATER ELECTROLYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033736885     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(99)00066-5     Document Type: Article

References (5)

1. Neagu C., Gardeniers J.G.E., Elwenspoek M., Kelly J.J. An electrochemical microactuator: principle and first results. J. Microelectromech. Syst. 5:(1):1996;2-9.
2. Neagu C., Gardeniers J.G.E., Elwenspoek M., Fluitman J.H.J. An electrochemical actuated microvalve. Proceedings of Actuator '96, Bremen 19-21 June. 1996.
3. Bard AJ, Faulkner LR. Electrochemical methods, New York, Wiley, 1980.
4. Bockris JO'M. Surface electrochemistry, New york, Plenum 1993.
5. White RE, Bockris JO'M, Conway BE. Modern aspects of electrochemistry, no. 15, New York, Plenum Press 1983.