MEMS-fabricated ICPE grippers for aqueous applications

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 556-559

  Zhou, J W L ^a   Li, W J ^a,b  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^b SHENYANG INSTITUTE OF AUTOMATION   (China)

Author keywords

Actuators; Chemical technology; Conducting materials; Fabrication; Grippers; Microactuators; Microinjection; Micromechanical devices; Polymer films; Robotics and automation

Indexed keywords

ACTUATORS; CONDUCTIVE FILMS; FABRICATION; FILMS; GOLD; GRIPPERS; MICROACTUATORS; MICROSYSTEMS; NANOCANTILEVERS; POLYMER FILMS; ROBOTICS; TRANSDUCERS;

AQUEOUS APPLICATIONS; BIOLOGICAL SENSORS; CANTILEVER STRUCTURES; CHEMICAL TECHNOLOGIES; CONDUCTING MATERIALS; MICRO-INJECTION; MICROMECHANICAL DEVICE; UNDERWATER MANIPULATION;

SOLID-STATE SENSORS;

EID: 3342898478     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215377     Document Type: Conference Paper

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