Effect of processing conditions on the piezoelectric properties of sol-gel derived Pb(Zr,Ti)O3 films for micromechanical applications

Journal of Materials Research

Volumn 20, Issue 6, 2005, Pages 1428-1435

  Perez J ^a   Vilarinho, Paulas M ^a   Kholkin, A L ^a   Herrero, J Manuel ^b   Zaldo, C ^b  

^a UNIVERSITY OF AVEIRO   (Portugal)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; DIELECTRIC PROPERTIES; DISTILLATION; ELECTRIC PROPERTIES; FERROELECTRICITY; PIEZOELECTRICITY; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

LEAD ZIRCONATE TITANATE (PZT) THIN FILMS; MICROMECHANICAL APPLICATIONS; MODIFIED SOL-GEL PROCESS; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC PROPERTIES;

LEAD COMPOUNDS;

EID: 26444512863     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2005.0203     Document Type: Article

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