Thin film micromachined structures for large-area applications

Journal of Non-Crystalline Solids

Volumn 266-269 B, Issue , 2000, Pages 1340-1344

  Boucinha, M ^a   Chu, V ^a   Conde, J P ^b  

^a INESC   (Portugal)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003104761     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0022-3093(99)00948-5     Document Type: Article

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