Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films

Journal of Applied Physics

Volumn 85, Issue 9, 1999, Pages 6711-6716

  Shepard Jr , Joseph F ^a   Chu, Fan ^b   Kanno, Isaku ^c   Trolier McKinstry, Susan ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b Ramtron International Corporation   (United States)

^c PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; ANNEALING; CRYSTALLIZATION; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SOL-GELS; SPUTTER DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS;

LEAD ZIRCONATE TITANATE THIN FILMS; TRANSVERSE PIEZOELECTRIC CHARACTERIZATION; WAFER FLEXURE METHODS;

DIELECTRIC FILMS;

EID: 0032606979     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370183     Document Type: Article

References (22)

1. J. L. Deschanvres, P. Rey, G. Delabouglise, M. Labeau, J. C. Joubert, and J. C. Peuzin, Sens. Actuators A 33, 43 (1992).
2. M. Toyama, R. Kubo, E. Takata, K. Tanaka, and K. Ohwada, Sens. Actuators A 45, 125 (1994).
3. J. F. Shepard, Jr., P. J. Moses, and S. Trolier-McKinstry, Mater. Res. Soc. Symp. Proc. 459, 225 (1996).
4. K. D. Budd, S. K. Dey, and D. A. Payne, Br. Ceram. Proc. 36, 107 (1985).
5. F. Chu, F. Xu, J. Shepard, Jr., and S. Trolier-McKinstry, Mater. Res. Soc. Symp. Proc. 492, 409 (1998).
6. I. Kanno, S. Fujii, T. Kamada, and R. Takayama, Appl. Phys. Lett. 70, 1378 (1997).
7. J. F. Shepard, Jr., P. J. Moses, and S. Trolier-McKinstry, Sens. Actuators A 71, 133 (1998).
8. B. Jaffe, J. W. R. Cook, and H. Jaffe, Piezoelectric Ceramics (R.A.N., India, 1971).
9. S. Takahashi, Ferroelectrics 41, 143 (1982).
10. W. L. Warren, D. Dimos, G. E. Pike, B. A. Tuttle, and M. V. Raymond, Appl. Phys. Lett. 67, 866 (1995).
11. A. L. Kholkin, K. G. Brooks, D. V. Taylor, S. Hiboux, and N. Setter, Int. Ferro. (submitted).
12. A. Kholkin, E. Colla, K. Brooks, P. Muralt, M. Kohli, T. Maeder, D. Taylor, and N. Setter, Microelectron. Eng. 29, 261 (1995).
13. W. A. Schulze and K. Ogino, Ferroelectrics 87, 361 (1988).
14. J. F. Shepard, Jr., J. P. Maria, B. Xu, and S. Trolier-McKinstry, J. Mater. Res. (submitted).
15. J. F. Shepard, Jr. and S. Trolier-McKinstry (unpublished).
16. R. F. Brown, Can. J. Phys. 39, 741 (1961).
17. H. H. A. Krueger, J. Acoust. Soc. Am. 42, 636 (1967).
18. W. L. Warren, D. Dimos, and R. Waser, MRS Bull. 21, 40 (1996).
19. T. Tani and D. A. Payne, J. Am. Ceram. Soc. 77, 1242 (1994).
20. K. R. Udayakumar, P. J. Schuele, J. Chen, S. B. Krupanidhi, and L. E. Cross, J. Appl. Phys. 77, 3981 (1995).
21. G. E. Pike, W. L. Warren, D. Dimos, B. A. Tuttle, R. Ramesh, J. Lee, V. G. Keramidas, and J. T. Evans, Appl. Phys. Lett. 66, 484 (1995).
22. J. P. Maria, Ph.D. thesis, The Pennsylvania State University, 1998.