The agglomeration dynamics of self-interstitials in growing Czochralski silicon crystals

Journal of Crystal Growth

Volumn 284, Issue 3-4, 2005, Pages 353-368

  Kulkarni, Milind S ^a   Holzer, Joseph C ^a   Ferry, Lee W ^a  

^a MEMC Electronic Materials Inc   (United States)

Author keywords

A1. Defects; A1. Microdefects; A1. Nucleation; A1. Point defects; A2. Czhochralski method; B2. Semiconducting silicon

Indexed keywords

DISLOCATIONS (CRYSTALS); NUCLEATION; POINT DEFECTS; SINGLE CRYSTALS;

CZOCHRALSKI METHOD; MICRODEFECTS;

SILICON;

EID: 26044449992     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.07.041     Document Type: Article

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