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Volumn 200, Issue 1-6, 2001, Pages 223-230

Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target

Author keywords

13 nm radiation; EUV optics; Gas puff target; Laser induced plasma; Multilayer mirror; Spectral characteristics

Indexed keywords

LASER BEAM EFFECTS; LASER OPTICS; LASER PRODUCED PLASMAS; MIRRORS; NEODYMIUM LASERS; PHOTODIODES; PLASMA COLLISION PROCESSES; SPECTRUM ANALYSIS;

EID: 0035893319     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(01)01639-X     Document Type: Article
Times cited : (72)

References (23)
  • 17
    • 0007450677 scopus 로고    scopus 로고
    • Ph.D. Thesis, RWTH Aachen, Shaker Verlag Aachen
    • (1998)
    • Schriever, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.