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Volumn 200, Issue 1-6, 2001, Pages 223-230
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Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target
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Author keywords
13 nm radiation; EUV optics; Gas puff target; Laser induced plasma; Multilayer mirror; Spectral characteristics
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Indexed keywords
LASER BEAM EFFECTS;
LASER OPTICS;
LASER PRODUCED PLASMAS;
MIRRORS;
NEODYMIUM LASERS;
PHOTODIODES;
PLASMA COLLISION PROCESSES;
SPECTRUM ANALYSIS;
ELECTRONIC EXCITATIONS;
ULTRAVIOLET RADIATION;
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EID: 0035893319
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-4018(01)01639-X Document Type: Article |
Times cited : (72)
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References (23)
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