SCOPUS 정보 검색 플랫폼

Volumn 79, Issue 11, 1996, Pages 8258-8268

Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser

(12) Celliers, P a Da Silva, L B a Dane, C B a Mrowka, S a Norton, M a Harder, J a Hackel, L a Matthews, D L a Fiedorowicz, H b Bartnik, A b Maldonado, J R c Abate, J A d

a LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

b MILITARY UNIVERSITY OF TECHNOLOGY (Poland)

c IBM MICROELECTRONICS (United States)

d LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000499628 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.362701 Document Type: Review

Times cited : (32)

References (29)

1
- 0018986730
- K. M. Gilbert, J. P. Anthes, M. A. Gusinow, M. A. Palmer, R. R. Whitlock, and D. J. Nagel, J. Appl. Phys. 51, 1449 (1980).
- (1980) J. Appl. Phys. , vol.51 , pp. 1449
- Gilbert, K.M.¹ Anthes, J.P.² Gusinow, M.A.³ Palmer, M.A.⁴ Whitlock, R.R.⁵ Nagel, D.J.⁶

2
- 0019601958
- B. Yaakobi, P. Bourke, Y. Conturie, J. Delettrez, J. M. Forsyth, R. D. Frankel, L. M. Goldman, R. L. McCrory, W. Seka, J. M. Soures, A. J. Burek, and R. E. Deslattes, Opt. Commun. 38, 196 (1981).
- (1981) Opt. Commun. , vol.38 , pp. 196
- Yaakobi, B.¹ Bourke, P.² Conturie, Y.³ Delettrez, J.⁴ Forsyth, J.M.⁵ Frankel, R.D.⁶ Goldman, L.M.⁷ McCrory, R.L.⁸ Seka, W.⁹ Soures, J.M.¹⁰ Burek, A.J.¹¹ Deslattes, R.E.¹²

3
- 0007996876
- H. Nishimura, F. Matsuoka, M. Yagi, K. Yamada, S. Nakai, G. H. McCall, and C. Yamanaka, Phys. Fluids 26, 1688 (1983).
- (1983) Phys. Fluids , vol.26 , pp. 1688
- Nishimura, H.¹ Matsuoka, F.² Yagi, M.³ Yamada, K.⁴ Nakai, S.⁵ McCall, G.H.⁶ Yamanaka, C.⁷

4
- 0020799024
- D. L. Matthews, E. M. Campbell, N. M. Ceglio, G. Hermes, R. Kauffman, L. Koppel, R. Lee, K. Manes, V. Rupert, V. W. Slivinsky, R. Turner, and F. Ze, J. Appl. Phys. 54, 4260 (1983).
- (1983) J. Appl. Phys. , vol.54 , pp. 4260
- Matthews, D.L.¹ Campbell, E.M.² Ceglio, N.M.³ Hermes, G.⁴ Kauffman, R.⁵ Koppel, L.⁶ Lee, R.⁷ Manes, K.⁸ Rupert, V.⁹ Slivinsky, V.W.¹⁰ Turner, R.¹¹ Ze, F.¹²

5
- 0001475669
- W. C. Mead, E. M. Campbell, K. G. Estabrook, R. E. Turner, W. L. Kruer, P. H. Y. Lee, B. Pruett, V. C. Rupert, K. G. Tirsell, G. L. Stradling, F. Ze, C. E. Max, M. D. Rosen, and B. F. Lasinski, Phys. Fluids 26, 2316 (1983).
- (1983) Phys. Fluids , vol.26 , pp. 2316
- Mead, W.C.¹ Campbell, E.M.² Estabrook, K.G.³ Turner, R.E.⁴ Kruer, W.L.⁵ Lee, P.H.Y.⁶ Pruett, B.⁷ Rupert, V.C.⁸ Tirsell, K.G.⁹ Stradling, G.L.¹⁰ Ze, F.¹¹ Max, C.E.¹² Rosen, M.D.¹³ Lasinski, B.F.¹⁴

6
- 4243075213
- P. Alaterre, H. Pépin, R. Fabbro, and B. Faral, Phys. Rev. A 34, 4184 (1986).
- (1986) Phys. Rev. A , vol.34 , pp. 4184
- Alaterre, P.¹ Pépin, H.² Fabbro, R.³ Faral, B.⁴

7
- 0002808447
- T. Mochizuki, T. Yabe, K. Okada, M. Hamada, N. Ikeda, S. Kiyokawa, and C. Yamanaka, Phys. Rev. A 33, 525 (1986).
- (1986) Phys. Rev. A , vol.33 , pp. 525
- Mochizuki, T.¹ Yabe, T.² Okada, K.³ Hamada, M.⁴ Ikeda, N.⁵ Kiyokawa, S.⁶ Yamanaka, C.⁷

8
- 0000804260
- R. Popil, P. D. Gupta, R. Fedosejevs, and A. A. Offenberger, Phys. Rev. A 35, 3874 (1987).
- (1987) Phys. Rev. A , vol.35 , pp. 3874
- Popil, R.¹ Gupta, P.D.² Fedosejevs, R.³ Offenberger, A.A.⁴

9
- 0025841512
- K. Eidmann and W. Schwanda, Laser Particle Beams 9, 551 (1991).
- (1991) Laser Particle Beams , vol.9 , pp. 551
- Eidmann, K.¹ Schwanda, W.²

10
- 6244247251
- J. N. Broughton and R. Fedosejevs, Appl. Phys. Lett. 60, 1818 (1992).
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1818
- Broughton, J.N.¹ Fedosejevs, R.²

11
- 0018031243
- D. J. Nagel, M. C. Peckerar, R. R. Whitlock, J. R. Greig, and R. E. Pechacek, Electron. Lett. 14, 781 (1978).
- (1978) Electron. Lett. , vol.14 , pp. 781
- Nagel, D.J.¹ Peckerar, M.C.² Whitlock, R.R.³ Greig, J.R.⁴ Pechacek, R.E.⁵

12
- 36749107188
- B. Yaakobi, H. Kim, J. M. Soures, H. W. Deckman, and J. Dunsmuir, Appl. Phys. Lett. 43, 686 (1983).
- (1983) Appl. Phys. Lett. , vol.43 , pp. 686
- Yaakobi, B.¹ Kim, H.² Soures, J.M.³ Deckman, H.W.⁴ Dunsmuir, J.⁵

13
- 0006501546
- H. Pépin, P. Alaterre, M. Chaker, R. Fabbro, B. Faral, I. Toubhans, D. J. Nagel, and M. Peckerar, J. Vac. Sci. Technol. B 5, 27 (1987).
- (1987) J. Vac. Sci. Technol. B , vol.5 , pp. 27
- Pépin, H.¹ Alaterre, P.² Chaker, M.³ Fabbro, R.⁴ Faral, B.⁵ Toubhans, I.⁶ Nagel, D.J.⁷ Peckerar, M.⁸

14
- 36549102481
- M. Chaker, H. Pépin, V. Bareau, B. Lafontaine, I. Toubhans, R. Fabbro, and B. Faral, J. Appl. Phys. 63, 892 (1988).
- (1988) J. Appl. Phys. , vol.63 , pp. 892
- Chaker, M.¹ Pépin, H.² Bareau, V.³ Lafontaine, B.⁴ Toubhans, I.⁵ Fabbro, R.⁶ Faral, B.⁷

15
- 0040856983
- G. M. Davis, M. C. Gower, F. O'Neill, and I. C. E. Turcu, Appl. Phys. Lett. 53, 1583 (1988).
- (1988) Appl. Phys. Lett. , vol.53 , pp. 1583
- Davis, G.M.¹ Gower, M.C.² O'Neill, F.³ Turcu, I.C.E.⁴

16
- 0000611892
- M. Chaker, B. L. Fontaine, C. Y. Côté, J. C. Kieffer, H. Pépin, M. H. Talon, G. D. Enright, and D. M. Villeneuve, J. Vac. Sci. Technol. B 10, 3239 (1992).
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 3239
- Chaker, M.¹ Fontaine, B.L.² Côté, C.Y.³ Kieffer, J.C.⁴ Pépin, H.⁵ Talon, M.H.⁶ Enright, G.D.⁷ Villeneuve, D.M.⁸

17
- 0027809288
- edited by G. K. Celler and J. R. Maldonado Materials Research Society, San Francisco, CA
- M. Chaker, J. F. Pelletier, and J. C. Kieffer, in Materials Aspects of X-ray Lithography, edited by G. K. Celler and J. R. Maldonado (Materials Research Society, San Francisco, CA, 1993), pp. 151-167.
- (1993) Materials Aspects of X-ray Lithography , pp. 151-167
- Chaker, M.¹ Pelletier, J.F.² Kieffer, J.C.³

18
- 0009433966
- R. Kodama, T. Mochizuki, K. A. Tanaka, and C. Yamanaka, Appl. Phys. Lett. 50, 720 (1987).
- (1987) Appl. Phys. Lett. , vol.50 , pp. 720
- Kodama, R.¹ Mochizuki, T.² Tanaka, K.A.³ Yamanaka, C.⁴

19
- 0029185057
- C. B. Dane, I. E. Zapata, W. A. Neuman, M. A. Norton, and L. A. Hackel, IEEE J. Quantum Electron. 31, 148 (1995).
- (1995) IEEE J. Quantum Electron. , vol.31 , pp. 148
- Dane, C.B.¹ Zapata, I.E.² Neuman, W.A.³ Norton, M.A.⁴ Hackel, L.A.⁵

20
- 0001594960
- C. B. Dane, L. A. Neuman, and L. A. Hackel, Opt. Lett. 17, 1271 (1992).
- (1992) Opt. Lett. , vol.17 , pp. 1271
- Dane, C.B.¹ Neuman, L.A.² Hackel, L.A.³

21
- 76749136431
- H. Fiedorowicz, A. Bartnik, Z. Patron, and P. Parys, Appl. Phys. Lett. 62, 1 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1
- Fiedorowicz, H.¹ Bartnik, A.² Patron, Z.³ Parys, P.⁴

22
- 85033009641
- Princeton Instruments, Inc., 3660 Quakerbridge Rd., Trenton, NJ 08619
- Princeton Instruments, Inc., 3660 Quakerbridge Rd., Trenton, NJ 08619.

23
- 0343572244
- B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro, and B. K. Fujikawa, At. Data Nucl. Data Tables 27, 1 (1982).
- (1982) At. Data Nucl. Data Tables , vol.27 , pp. 1
- Henke, B.L.¹ Lee, P.² Tanaka, T.J.³ Shimabukuro, R.L.⁴ Fujikawa, B.K.⁵

24
- 0003990482
- D. R. Kania, L. Pan, H. Korblum, P. Bell, O. L. Landen, and P. Pianetta, Rev. Sci. Instrum. 61, 2765 (1990).
- (1990) Rev. Sci. Instrum. , vol.61 , pp. 2765
- Kania, D.R.¹ Pan, L.² Korblum, H.³ Bell, P.⁴ Landen, O.L.⁵ Pianetta, P.⁶

25
- 0001442440
- D. R. Kania, H. Kornblum, B. A. Hammel, J. Seely, C. Brown, U. Feldman, G. Glendenning, P. Young, E. Hsieh, M. Hennesian, L. DaSilva, B. J. MacGowan, D. S. Montgomery, C. A. Back, R. Doyas, J. Edwards, and R. W. Lee, Phys. Rev. A 46, 7853 (1992).
- (1992) Phys. Rev. A , vol.46 , pp. 7853
- Kania, D.R.¹ Kornblum, H.² Hammel, B.A.³ Seely, J.⁴ Brown, C.⁵ Feldman, U.⁶ Glendenning, G.⁷ Young, P.⁸ Hsieh, E.⁹ Hennesian, M.¹⁰ DaSilva, L.¹¹ MacGowan, B.J.¹² Montgomery, D.S.¹³ Back, C.A.¹⁴ Doyas, R.¹⁵ Edwards, J.¹⁶ Lee, R.W.¹⁷

26
- 0038830872
- D. R. Kania, L. S. Pan, P. Bell, O. L. Landen, H. Kornblum, P. Pianetta, and M. D. Perry, J. Appl. Phys. 68, 124 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 124
- Kania, D.R.¹ Pan, L.S.² Bell, P.³ Landen, O.L.⁴ Kornblum, H.⁵ Pianetta, P.⁶ Perry, M.D.⁷

27
- 85033005354
- Lebow Company, 5960 Mandarin Avenue, Goleta, CA 93117
- Lebow Company, 5960 Mandarin Avenue, Goleta, CA 93117.

28
- 0022112970
- J. F. Wyart, C. Bauch-Arnoult, E. Luc-Koenig, and TFR Group, Phys. Scr. 32, 103 (1985).
- (1985) Phys. Scr. , vol.32 , pp. 103
- Wyart, J.F.¹ Bauch-Arnoult, C.² Luc-Koenig, E.³

29
- 36849106512
- T. W. Johnston and J. W. Dawson, Phys. Fluids 16, 722 (1973).
- (1973) Phys. Fluids , vol.16 , pp. 722
- Johnston, T.W.¹ Dawson, J.W.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.