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Volumn 4504, Issue , 2001, Pages 69-76

Characterization and optimization of a laser-produced x-ray source with a double-stream gas puff target

Author keywords

Gas puff target; Laser applications; Laser produced x ray sources; X ray optics

Indexed keywords

CHARGE COUPLED DEVICES; LASER BEAM EFFECTS; PHOTODIODES; ULTRAVIOLET RADIATION; X RAY OPTICS;

EID: 0035762148     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448451     Document Type: Article
Times cited : (6)

References (12)
  • 1
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    • Laser plasma x-ray source with a gas pu ff target
    • X-ray Optics and Microanalysis 1992, IOP Publishing, Bristol
    • H. Fiedorowicz, A. Bartnik, P. Paws, Z. Patron, "Laser plasma x-ray source with a gas pu ff target" Inst. Phys. Conf. Set. No. 130, X-ray Optics and Microanalysis 1992, IOP Publishing, Bristol, 1992, p. 515.
    • (1992) Inst. Phys. Conf. Ser. , Issue.130 , pp. 515
    • Fiedorowicz, H.1    Bartnik, A.2    Paws, P.3    Patron, Z.4
  • 3
    • 0030314823 scopus 로고    scopus 로고
    • Debrisless laser-produced x-ray source with a gas puff target
    • Electron-Beam, X-ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, ed. D.E. Seager (SPIE Press, Bellingham)
    • H. Fiedorowicz, A. Bartnik, J. Kostecki, M. Szczurek, "Debrisless laser-produced x-ray source with a gas puff target" in Proc. SPIE vol. 2723, Electron-Beam, X-ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, ed. D.E. Seager (SPIE Press, Bellingham, 1996) p. 310.
    • (1996) Proc. SPIE , vol.2723 , pp. 310
    • Fiedorowicz, H.1    Bartnik, A.2    Kostecki, J.3    Szczurek, M.4
  • 5
    • 0000360517 scopus 로고    scopus 로고
    • X-ray emission in the 'water window' from a nitrogen gas puff target irradiated with a nanosecond Nd:glass laser pulse
    • H. Fiedorowicz, A. Bartnik, R. Jarocki, M. Szczurek, T. Wilhein, "X-ray emission in the 'water window' from a nitrogen gas puff target irradiated with a nanosecond Nd:glass laser pulse" Appl. Phys. B 67, 391 (1998).
    • (1998) Appl. Phys. B , vol.67 , pp. 391
    • Fiedorowicz, H.1    Bartnik, A.2    Jarocki, R.3    Szczurek, M.4    Wilhein, T.5
  • 7
    • 0000951834 scopus 로고    scopus 로고
    • Enhanced x-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double-nozzle setup
    • H. Fiedorowicz, A. Bartnik, R. Jarocki, R. Rakowski, M. Szczurek, "Enhanced x-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double-nozzle setup" Appl. Phys. B 70, 305 (2000).
    • (2000) Appl. Phys. B , vol.70 , pp. 305
    • Fiedorowicz, H.1    Bartnik, A.2    Jarocki, R.3    Rakowski, R.4    Szczurek, M.5
  • 8
    • 0034298740 scopus 로고    scopus 로고
    • Strong EUV emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser
    • H. Fiedorowicz, A. Bartnik, H. Daido, I.W. Choi, M. Suzuki, S. Yamagami, "Strong EUV emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser" Optics Communications 184, 161 (2000).
    • (2000) Optics Communications , vol.184 , pp. 161
    • Fiedorowicz, H.1    Bartnik, A.2    Daido, H.3    Choi, I.W.4    Suzuki, M.5    Yamagami, S.6
  • 10
    • 0034763271 scopus 로고    scopus 로고
    • Laser-induced EUV source for optics characterization
    • Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham) - in print
    • K. Mann and S. Kranzusch, "Laser-induced EUV source for optics characterization" in Proc. SPIE vol. 4343, Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham, 2001) - in print.
    • (2001) Proc. SPIE , vol.4343
    • Mann, K.1    Kranzusch, S.2
  • 11
    • 0034757281 scopus 로고    scopus 로고
    • Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography
    • Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham) - in print
    • H. Fiedorowicz, A. Bartnik, H. Daido, R. Jarocki, R. Rakowski, M. Suzuki, M. Szczurek, S. Yamagami, "Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography" in Proc. SPIE vol. 4343, Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham, 2001) - in print.
    • (2001) Proc. SPIE , vol.4343
    • Fiedorowicz, H.1    Bartnik, A.2    Daido, H.3    Jarocki, R.4    Rakowski, R.5    Suzuki, M.6    Szczurek, M.7    Yamagami, S.8
  • 12
    • 18644372989 scopus 로고    scopus 로고
    • Investigation on soft x-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the prague asterix laser system (PALS)
    • Advances in Laboratory-based X-ray Sources and Optics II, eds. A.M. Khounsary and C.A. MacDonald (SPIE Press, Bellingham) - in print
    • H. Fiedorowicz, A. Bartnik, J. Wawer, L. Juha, K. Jungwirth, B. Kralikova, J. Krasa, T. Mocek, M. Pfeifer, J. Skala, J. Ullschmied, M. Horwath, L. Pina, "Investigation on soft x-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS)" in Proc. SPIE vol. 4502, Advances in Laboratory-based X-ray Sources and Optics II, eds. A.M. Khounsary and C.A. MacDonald (SPIE Press, Bellingham, 2001) - in print.
    • (2001) Proc. SPIE , vol.4502
    • Fiedorowicz, H.1    Bartnik, A.2    Wawer, J.3    Juha, L.4    Jungwirth, K.5    Kralikova, B.6    Krasa, J.7    Mocek, T.8    Pfeifer, M.9    Skala, J.10    Ullschmied, J.11    Horwath, M.12    Pina, L.13


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.