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1
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0000971805
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Laser plasma x-ray source with a gas pu ff target
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X-ray Optics and Microanalysis 1992, IOP Publishing, Bristol
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H. Fiedorowicz, A. Bartnik, P. Paws, Z. Patron, "Laser plasma x-ray source with a gas pu ff target" Inst. Phys. Conf. Set. No. 130, X-ray Optics and Microanalysis 1992, IOP Publishing, Bristol, 1992, p. 515.
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(1992)
Inst. Phys. Conf. Ser.
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Fiedorowicz, H.1
Bartnik, A.2
Paws, P.3
Patron, Z.4
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2
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21544439098
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X-ray emission from laser-irradiated gas puff targets
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H. Fiedorowicz, A. Bartnik, Z. Patron, P. Parys, "X-ray emission from laser-irradiated gas puff targets" Appl.Phys.Lett. 62, 2778 (1993).
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(1993)
Appl. Phys. Lett.
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Fiedorowicz, H.1
Bartnik, A.2
Patron, Z.3
Parys, P.4
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3
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0030314823
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Debrisless laser-produced x-ray source with a gas puff target
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Electron-Beam, X-ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, ed. D.E. Seager (SPIE Press, Bellingham)
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H. Fiedorowicz, A. Bartnik, J. Kostecki, M. Szczurek, "Debrisless laser-produced x-ray source with a gas puff target" in Proc. SPIE vol. 2723, Electron-Beam, X-ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, ed. D.E. Seager (SPIE Press, Bellingham, 1996) p. 310.
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Proc. SPIE
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Fiedorowicz, H.1
Bartnik, A.2
Kostecki, J.3
Szczurek, M.4
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4
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0000499628
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Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser
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P. Celliers, L.B. DaSilva, C.B. Dane, S. Mrowka, M. Norton, J. Harder, L.A. Hackel, D.L. Matthews, H. Fiedorowicz, A. Bartnik, J.R. Maldonado, J.A. Abate, "Optimization of x-ray sources for proximity lithography produced by a high average power Nd:glass laser," J. Appl. Phys. 79, 8258 (1996).
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(1996)
J. Appl. Phys.
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Celliers, P.1
DaSilva, L.B.2
Dane, C.B.3
Mrowka, S.4
Norton, M.5
Harder, J.6
Hackel, L.A.7
Matthews, D.L.8
Fiedorowicz, H.9
Bartnik, A.10
Maldonado, J.R.11
Abate, J.A.12
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5
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0000360517
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X-ray emission in the 'water window' from a nitrogen gas puff target irradiated with a nanosecond Nd:glass laser pulse
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H. Fiedorowicz, A. Bartnik, R. Jarocki, M. Szczurek, T. Wilhein, "X-ray emission in the 'water window' from a nitrogen gas puff target irradiated with a nanosecond Nd:glass laser pulse" Appl. Phys. B 67, 391 (1998).
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(1998)
Appl. Phys. B
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, pp. 391
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Fiedorowicz, H.1
Bartnik, A.2
Jarocki, R.3
Szczurek, M.4
Wilhein, T.5
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6
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0032655074
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Investigation of soft x-ray emission from a gas puff target irradiated with a Nd:YAG laser
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H. Fiedorowicz, A. Bartnik, M. Szczurek, H. Daido, N. Sakaya, V. Kmetik, Y. Kato, M. Suzuki, M. Matsumura, J. Tajima, T. Nakayama, T. Wilhein, "Investigation of soft x-ray emission from a gas puff target irradiated with a Nd:YAG laser," Opt. Communications 163, 103 (1999).
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(1999)
Opt. Communications
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, pp. 103
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Fiedorowicz, H.1
Bartnik, A.2
Szczurek, M.3
Daido, H.4
Sakaya, N.5
Kmetik, V.6
Kato, Y.7
Suzuki, M.8
Matsumura, M.9
Tajima, J.10
Nakayama, T.11
Wilhein, T.12
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7
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0000951834
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Enhanced x-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double-nozzle setup
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H. Fiedorowicz, A. Bartnik, R. Jarocki, R. Rakowski, M. Szczurek, "Enhanced x-ray emission in the 1-keV range from a laser-irradiated gas puff target produced using the double-nozzle setup" Appl. Phys. B 70, 305 (2000).
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(2000)
Appl. Phys. B
, vol.70
, pp. 305
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Fiedorowicz, H.1
Bartnik, A.2
Jarocki, R.3
Rakowski, R.4
Szczurek, M.5
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8
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0034298740
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Strong EUV emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser
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H. Fiedorowicz, A. Bartnik, H. Daido, I.W. Choi, M. Suzuki, S. Yamagami, "Strong EUV emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser" Optics Communications 184, 161 (2000).
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(2000)
Optics Communications
, vol.184
, pp. 161
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Fiedorowicz, H.1
Bartnik, A.2
Daido, H.3
Choi, I.W.4
Suzuki, M.5
Yamagami, S.6
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9
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84994899722
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Emerging Lithographic Technologies IV, Ed. E.A. Dobisz, SPIE Press, Bellingham
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R. De Bruijn, A. Bartnik, H. Fledderus, H. Fiedorowicz, P. Hageman, R. Constantinescu, F. Bijkerk, in Proc. of SPIE Vol. 3997, Emerging Lithographic Technologies IV, Ed. E.A. Dobisz, (SPIE Press, Bellingham, 2000).
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(2000)
Proc. of SPIE
, vol.3997
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De Bruijn, R.1
Bartnik, A.2
Fledderus, H.3
Fiedorowicz, H.4
Hageman, P.5
Constantinescu, R.6
Bijkerk, F.7
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10
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0034763271
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Laser-induced EUV source for optics characterization
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Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham) - in print
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K. Mann and S. Kranzusch, "Laser-induced EUV source for optics characterization" in Proc. SPIE vol. 4343, Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham, 2001) - in print.
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(2001)
Proc. SPIE
, vol.4343
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Mann, K.1
Kranzusch, S.2
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11
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0034757281
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Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography
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Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham) - in print
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H. Fiedorowicz, A. Bartnik, H. Daido, R. Jarocki, R. Rakowski, M. Suzuki, M. Szczurek, S. Yamagami, "Characterization of a laser-produced x-ray source with a double-stream gas puff target for x-ray and EUV lithography" in Proc. SPIE vol. 4343, Emerging Lithographic Technologies V, ed. E. Dobisz (SPIE Press, Bellingham, 2001) - in print.
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(2001)
Proc. SPIE
, vol.4343
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Fiedorowicz, H.1
Bartnik, A.2
Daido, H.3
Jarocki, R.4
Rakowski, R.5
Suzuki, M.6
Szczurek, M.7
Yamagami, S.8
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12
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18644372989
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Investigation on soft x-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the prague asterix laser system (PALS)
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Advances in Laboratory-based X-ray Sources and Optics II, eds. A.M. Khounsary and C.A. MacDonald (SPIE Press, Bellingham) - in print
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H. Fiedorowicz, A. Bartnik, J. Wawer, L. Juha, K. Jungwirth, B. Kralikova, J. Krasa, T. Mocek, M. Pfeifer, J. Skala, J. Ullschmied, M. Horwath, L. Pina, "Investigation on soft x-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS)" in Proc. SPIE vol. 4502, Advances in Laboratory-based X-ray Sources and Optics II, eds. A.M. Khounsary and C.A. MacDonald (SPIE Press, Bellingham, 2001) - in print.
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(2001)
Proc. SPIE
, vol.4502
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Fiedorowicz, H.1
Bartnik, A.2
Wawer, J.3
Juha, L.4
Jungwirth, K.5
Kralikova, B.6
Krasa, J.7
Mocek, T.8
Pfeifer, M.9
Skala, J.10
Ullschmied, J.11
Horwath, M.12
Pina, L.13
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