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Volumn 362, Issue 1-2, 2004, Pages 67-70

High-brightness laser plasma soft X-ray source using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS)

Author keywords

Laser processing; X Ray spectroscopy

Indexed keywords

CHARGE COUPLED DEVICES; LASER PULSES; ORGANIC POLYMERS; PHOTODIODES; PLASMAS; SOLID STATE LASERS; X RAY SPECTROSCOPY;

EID: 0344466404     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-8388(03)00564-4     Document Type: Conference Paper
Times cited : (33)

References (18)
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    • 0000971805 scopus 로고
    • Laser plasma X-ray source with a gas puff target
    • X-Ray Optics and Microanalysis 1992 Bristol: IOP Publishing
    • Fiedorowicz H., Bartnik A., Parys P., Patron Z. Laser plasma X-ray source with a gas puff target. X-Ray Optics and Microanalysis 1992. Inst. Phys. Conf. Ser. No. 130. 1992;515 IOP Publishing, Bristol.
    • (1992) Inst. Phys. Conf. Ser. No. 130 , pp. 515
    • Fiedorowicz, H.1    Bartnik, A.2    Parys, P.3    Patron, Z.4
  • 3
    • 0030314823 scopus 로고    scopus 로고
    • Debrisless laser-produced X-ray source with a gas puff target
    • Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI D.E. Seager. Bellingham, MA: SPIE - The International Society for Optical Engineering
    • Fiedorowicz H., Bartnik A., Kostecki J., Szczurek M. Debrisless laser-produced X-ray source with a gas puff target. Seager D.E. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI. Proceedings of SPIE. Vol. 2723:1996;310 SPIE - The International Society for Optical Engineering, Bellingham, MA.
    • (1996) Proceedings of SPIE , vol.2723 , pp. 310
    • Fiedorowicz, H.1    Bartnik, A.2    Kostecki, J.3    Szczurek, M.4
  • 9
    • 0033716199 scopus 로고    scopus 로고
    • Characterization of a novel double-gas-jet laser plasma EUV source
    • Emerging Lithographic Technologies IV E.A. Dobisz. Bellingham, MA: SPIE - The International Society for Optical Engineering
    • De Bruijn R., Bartnik A., Fledderus H., Fiedorowicz H., Hageman P., Constantinescu R., Bijkerk F. Characterization of a novel double-gas-jet laser plasma EUV source. Dobisz E.A. Emerging Lithographic Technologies IV. Proceedings of SPIE. 3997:2000;48 SPIE - The International Society for Optical Engineering, Bellingham, MA.
    • (2000) Proceedings of SPIE , vol.3997 , pp. 48
    • De Bruijn, R.1    Bartnik, A.2    Fledderus, H.3    Fiedorowicz, H.4    Hageman, P.5    Constantinescu, R.6    Bijkerk, F.7
  • 11
    • 0034757281 scopus 로고    scopus 로고
    • Characterization of a laser-produced X-ray source with a double-stream gas puff target for X-ray and EUV lithography
    • Emerging Lithographic Technologies V E.A. Dobisz. Bellingham, MA: SPIE - The International Society for Optical Engineering
    • Fiedorowicz H., Bartnik A., Daido H., Jarocki R., Rakowski R., Suzuki M., Szczurek M., Yamagami S. Characterization of a laser-produced X-ray source with a double-stream gas puff target for X-ray and EUV lithography. Dobisz E.A. Emerging Lithographic Technologies V. Proceedings of SPIE. Vol. 4343:2001;32 SPIE - The International Society for Optical Engineering, Bellingham, MA.
    • (2001) Proceedings of SPIE , vol.4343 , pp. 32
    • Fiedorowicz, H.1    Bartnik, A.2    Daido, H.3    Jarocki, R.4    Rakowski, R.5    Suzuki, M.6    Szczurek, M.7    Yamagami, S.8
  • 12
    • 0035762148 scopus 로고    scopus 로고
    • Characterization and optimization of a laser-produced X-ray source with a double-stream gas puff target
    • Applications of X-Rays Generated from Lasers and Other Bright Sources II G.A. Kyrala, & J.-C.J. Gauthier. Bellingham, MA: SPIE - The International Society for Optical Engineering
    • Fiedorowicz H., Bartnik A., Jarocki R., Kostecki J., Krzywiński J., Rakowski R., Szczurek M. Characterization and optimization of a laser-produced X-ray source with a double-stream gas puff target. Kyrala G.A., Gauthier J.-C.J. Applications of X-Rays Generated from Lasers and Other Bright Sources II. Proceedings of SPIE. 4504:2001;26 SPIE - The International Society for Optical Engineering, Bellingham, MA.
    • (2001) Proceedings of SPIE , vol.4504 , pp. 26
    • Fiedorowicz, H.1    Bartnik, A.2    Jarocki, R.3    Kostecki, J.4    Krzywiński, J.5    Rakowski, R.6    Szczurek, M.7
  • 13
    • 18644372989 scopus 로고    scopus 로고
    • Investigation on soft X-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS)
    • Advances in Laboratory-Based X-ray Sources and Optics II A.M. Khounsary, & C.A. MacDonald. Bellingham, MA: SPIE - The International Society for Optical Engineering
    • Fiedorowicz H., Bartnik A., Wawer J., Juha L., Jungwirth K., Kralikova B., Krasa J., Mocek T., Pfeifer M., Skala J., Ullschmied J., Horwath M., Pina L. Investigation on soft X-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS). Khounsary A.M., MacDonald C.A. Advances in Laboratory-Based X-ray Sources and Optics II. Proceedings of SPIE. Vol. 4502:2001;14 SPIE - The International Society for Optical Engineering, Bellingham, MA.
    • (2001) Proceedings of SPIE , vol.4502 , pp. 14
    • Fiedorowicz, H.1    Bartnik, A.2    Wawer, J.3    Juha, L.4    Jungwirth, K.5    Kralikova, B.6    Krasa, J.7    Mocek, T.8    Pfeifer, M.9    Skala, J.10    Ullschmied, J.11    Horwath, M.12    Pina, L.13


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.