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1
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0000971805
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Laser plasma X-ray source with a gas puff target
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X-Ray Optics and Microanalysis 1992 Bristol: IOP Publishing
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Fiedorowicz H., Bartnik A., Parys P., Patron Z. Laser plasma X-ray source with a gas puff target. X-Ray Optics and Microanalysis 1992. Inst. Phys. Conf. Ser. No. 130. 1992;515 IOP Publishing, Bristol.
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Fiedorowicz, H.1
Bartnik, A.2
Parys, P.3
Patron, Z.4
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3
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0030314823
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Debrisless laser-produced X-ray source with a gas puff target
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Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI D.E. Seager. Bellingham, MA: SPIE - The International Society for Optical Engineering
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Fiedorowicz H., Bartnik A., Kostecki J., Szczurek M. Debrisless laser-produced X-ray source with a gas puff target. Seager D.E. Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI. Proceedings of SPIE. Vol. 2723:1996;310 SPIE - The International Society for Optical Engineering, Bellingham, MA.
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Proceedings of SPIE
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Fiedorowicz, H.1
Bartnik, A.2
Kostecki, J.3
Szczurek, M.4
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4
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0000499628
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Celliers P., DaSilva L.B., Dane C.B., Mrowka S., Norton M., Harder J., Hackel L.A., Matthews D.L., Fiedorowicz H., Bartnik A., Maldonado J.R., Abate J.A. J. Appl. Phys. 79:1996;8258.
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(1996)
J. Appl. Phys.
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Celliers, P.1
Dasilva, L.B.2
Dane, C.B.3
Mrowka, S.4
Norton, M.5
Harder, J.6
Hackel, L.A.7
Matthews, D.L.8
Fiedorowicz, H.9
Bartnik, A.10
Maldonado, J.R.11
Abate, J.A.12
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5
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0000360517
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Fiedorowicz H., Bartnik A., Jarocki R., Szczurek M., Wilhein T. Appl. Phys. B. 67:1998;391.
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(1998)
Appl. Phys. B
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Fiedorowicz, H.1
Bartnik, A.2
Jarocki, R.3
Szczurek, M.4
Wilhein, T.5
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6
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0032655074
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Fiedorowicz H., Bartnik A., Szczurek M., Daido H., Sakaya N., Kmetik V., Kato Y., Suzuki M., Matsumura M., Tajima J., Nakayama T., Wilhein T. Opt. Commun. 163:1999;103.
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(1999)
Opt. Commun.
, vol.163
, pp. 103
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Fiedorowicz, H.1
Bartnik, A.2
Szczurek, M.3
Daido, H.4
Sakaya, N.5
Kmetik, V.6
Kato, Y.7
Suzuki, M.8
Matsumura, M.9
Tajima, J.10
Nakayama, T.11
Wilhein, T.12
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7
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0000951834
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Fiedorowicz H., Bartnik A., Jarocki R., Rakowski R., Szczurek M. Appl. Phys. B. 70:2000;305.
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(2000)
Appl. Phys. B
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Fiedorowicz, H.1
Bartnik, A.2
Jarocki, R.3
Rakowski, R.4
Szczurek, M.5
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8
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0034298740
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Fiedorowicz H., Bartnik A., Daido H., Choi I.W., Suzuki M., Yamagami S. Opt. Commun. 184:2000;161.
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(2000)
Opt. Commun.
, vol.184
, pp. 161
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Fiedorowicz, H.1
Bartnik, A.2
Daido, H.3
Choi, I.W.4
Suzuki, M.5
Yamagami, S.6
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9
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0033716199
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Characterization of a novel double-gas-jet laser plasma EUV source
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Emerging Lithographic Technologies IV E.A. Dobisz. Bellingham, MA: SPIE - The International Society for Optical Engineering
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De Bruijn R., Bartnik A., Fledderus H., Fiedorowicz H., Hageman P., Constantinescu R., Bijkerk F. Characterization of a novel double-gas-jet laser plasma EUV source. Dobisz E.A. Emerging Lithographic Technologies IV. Proceedings of SPIE. 3997:2000;48 SPIE - The International Society for Optical Engineering, Bellingham, MA.
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(2000)
Proceedings of SPIE
, vol.3997
, pp. 48
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De Bruijn, R.1
Bartnik, A.2
Fledderus, H.3
Fiedorowicz, H.4
Hageman, P.5
Constantinescu, R.6
Bijkerk, F.7
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11
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0034757281
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Characterization of a laser-produced X-ray source with a double-stream gas puff target for X-ray and EUV lithography
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Emerging Lithographic Technologies V E.A. Dobisz. Bellingham, MA: SPIE - The International Society for Optical Engineering
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Fiedorowicz H., Bartnik A., Daido H., Jarocki R., Rakowski R., Suzuki M., Szczurek M., Yamagami S. Characterization of a laser-produced X-ray source with a double-stream gas puff target for X-ray and EUV lithography. Dobisz E.A. Emerging Lithographic Technologies V. Proceedings of SPIE. Vol. 4343:2001;32 SPIE - The International Society for Optical Engineering, Bellingham, MA.
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(2001)
Proceedings of SPIE
, vol.4343
, pp. 32
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Fiedorowicz, H.1
Bartnik, A.2
Daido, H.3
Jarocki, R.4
Rakowski, R.5
Suzuki, M.6
Szczurek, M.7
Yamagami, S.8
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12
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0035762148
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Characterization and optimization of a laser-produced X-ray source with a double-stream gas puff target
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Applications of X-Rays Generated from Lasers and Other Bright Sources II G.A. Kyrala, & J.-C.J. Gauthier. Bellingham, MA: SPIE - The International Society for Optical Engineering
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Fiedorowicz H., Bartnik A., Jarocki R., Kostecki J., Krzywiński J., Rakowski R., Szczurek M. Characterization and optimization of a laser-produced X-ray source with a double-stream gas puff target. Kyrala G.A., Gauthier J.-C.J. Applications of X-Rays Generated from Lasers and Other Bright Sources II. Proceedings of SPIE. 4504:2001;26 SPIE - The International Society for Optical Engineering, Bellingham, MA.
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(2001)
Proceedings of SPIE
, vol.4504
, pp. 26
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Fiedorowicz, H.1
Bartnik, A.2
Jarocki, R.3
Kostecki, J.4
Krzywiński, J.5
Rakowski, R.6
Szczurek, M.7
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13
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18644372989
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Investigation on soft X-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS)
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Advances in Laboratory-Based X-ray Sources and Optics II A.M. Khounsary, & C.A. MacDonald. Bellingham, MA: SPIE - The International Society for Optical Engineering
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Fiedorowicz H., Bartnik A., Wawer J., Juha L., Jungwirth K., Kralikova B., Krasa J., Mocek T., Pfeifer M., Skala J., Ullschmied J., Horwath M., Pina L. Investigation on soft X-ray emission in the 'water window' for microscopy using a double-stream gas puff target irradiated with the Prague Asterix Laser System (PALS). Khounsary A.M., MacDonald C.A. Advances in Laboratory-Based X-ray Sources and Optics II. Proceedings of SPIE. Vol. 4502:2001;14 SPIE - The International Society for Optical Engineering, Bellingham, MA.
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(2001)
Proceedings of SPIE
, vol.4502
, pp. 14
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Fiedorowicz, H.1
Bartnik, A.2
Wawer, J.3
Juha, L.4
Jungwirth, K.5
Kralikova, B.6
Krasa, J.7
Mocek, T.8
Pfeifer, M.9
Skala, J.10
Ullschmied, J.11
Horwath, M.12
Pina, L.13
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14
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0344991861
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manuscript in preparation
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H. Fiedorowicz, A. Bartnik, L. Juha, K. Jungwirth, B. Králiková, J. Krása, M. Pfeifer, K. Rohlena, J. Skála, V. Skalova, J. Ullschmied, J. Wawer, M. Wieland, T. Wilhein, Laser plasma soft X-ray source for a single-shot exposure microscope, manuscript in preparation.
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Laser Plasma Soft X-ray Source for a Single-shot Exposure Microscope
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Fiedorowicz, H.1
Bartnik, A.2
Juha, L.3
Jungwirth, K.4
Králiková, B.5
Krása, J.6
Pfeifer, M.7
Rohlena, K.8
Skála, J.9
Skalova, V.10
Ullschmied, J.11
Wawer, J.12
Wieland, M.13
Wilhein, T.14
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15
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6644222158
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Jungwirth K., Cejnarova A., Juha L., Kralikova B., Krasa J., Krousky E., Krupickova P., Laska L., Masek K., Mocek T., Pfeifer M., Prag A., Renner O., Rohlena K., Rus B., Skala J., Straka P., Ullschmied J. Phys. Plasmas. 8:2001;2495.
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Phys. Plasmas
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Jungwirth, K.1
Cejnarova, A.2
Juha, L.3
Kralikova, B.4
Krasa, J.5
Krousky, E.6
Krupickova, P.7
Laska, L.8
Masek, K.9
Mocek, T.10
Pfeifer, M.11
Prag, A.12
Renner, O.13
Rohlena, K.14
Rus, B.15
Skala, J.16
Straka, P.17
Ullschmied, J.18
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16
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0035981094
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Back C.A., Grun J., Decker C., Suter L.J., Davis J., Landen O.L., Wallace R., Hsing W.W., Laming J.M., Feldman U., Miller M.C., Wuest C. Phys. Rev. Lett. 87:2001;275003.
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Phys. Rev. Lett.
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Back, C.A.1
Grun, J.2
Decker, C.3
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Davis, J.5
Landen, O.L.6
Wallace, R.7
Hsing, W.W.8
Laming, J.M.9
Feldman, U.10
Miller, M.C.11
Wuest, C.12
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1842694389
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Ablation of organic polymers and elemental solids induced by intense XUV radiation
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J.J. Rocca (Ed.), in press
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L. Juha, A.R. Präg, J. Krása, A. Cejnarová, B. Králiková, J. Skála, D. Chvostová, V. Vorlǐek, J. Krzywinski, A. Andrejczuk, M. Jurek, D. Klinger, R. Sobierajski, H. Fiedorowicz, A. Bartnik, L. Pína, J. Kravárik, P. Kubeš, Y.L. Bakshaev, A.S. Chernenko, V.D. Korolev, M.I. Ivanov, M. Scholz, L. Ryc, K. Tomaszewski, R. Viskup, F.P. Boody, Ablation of organic polymers and elemental solids induced by intense XUV radiation, in: J.J. Rocca (Ed.), Proceedings of the 8th International Conference on X-ray Lasers, 2002, in press.
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Proceedings of the 8th International Conference on X-ray Lasers
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Juha, L.1
Präg, A.R.2
Krása, J.3
Cejnarová, A.4
Králiková, B.5
Skála, J.6
Chvostová, D.7
Vorlǐek, V.8
Krzywinski, J.9
Andrejczuk, A.10
Jurek, M.11
Klinger, D.12
Sobierajski, R.13
Fiedorowicz, H.14
Bartnik, A.15
Pína, L.16
Kravárik, J.17
Kubeš, P.18
Bakshaev, Y.L.19
Chernenko, A.S.20
Korolev, V.D.21
Ivanov, M.I.22
Scholz, M.23
Ryc, L.24
Tomaszewski, K.25
Viskup, R.26
Boody, F.P.27
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