CNx/Si thin heterostructures for miniaturized temperature sensors

Journal of Applied Physics

Volumn 95, Issue 9, 2004, Pages 5111-5115

  Simeonov, S ^a   Szekeres, A ^a   Gyorgy E ^b   Mihailescu, I N ^b   Perrone, A ^c  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b INSTITUTE OF ATOMIC PHYSICS   (Romania)

^c UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONDUCTANCE; ELECTRON ENERGY LEVELS; EXCIMER LASERS; LASER ABLATION; MICROHARDNESS; PULSED LASER DEPOSITION; SENSORS; SUBSTRATES; SYNTHESIS (CHEMICAL);

REACTIVE PULSED LASER DEPOSITION (RPLD); ROOM TEMPERATURE; TEMPERATURE SENSORS;

HETEROJUNCTIONS;

EID: 2442684540     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1691482     Document Type: Article

References (25)

1. A. Y. Lui and M. L. Cohen, Phys. Rev. B 41, 10727 (1990).
2. E. Fogarassy, T. Szorenyi, F. Antoni, G. Pirio, J. Olivier, P. Legagneux, and P. Boher, Appl. Phys. A: Mater. Sci. Process. 76, 15 (2003).
3. J. Wei and P. Hing, Thin Solid Films 410, 21 (2002).
4. Y. K. Yap, S. Kida, Y. Wada, M. Yoshimura, Y. Mori, and T. Sasaki, Diamond Relat. Mater. 9, 1228 (2000).
5. M. A. Monclus, D. C. Cameron, and A. K. M. S. Chowdhurry, Thin Solid Films 341, 94 (1999).
6. C. Popov, L. M. Zambov, M. F. Plass, and W. Kulish, Thin Solid Films 377, 156 (2000).
7. L. M. Zambov, C. Popov, M. F. Plass, A. Bock, M. Jelinek, J. Lancok, K. Masseli, and W. Kulish, Appl. Phys. A: Mater. Sci. Process. 70, 603 (2000).
8. Pulsed Laser Deposition of Thin Films, edited by D. B. Chrisey and G. K. Hubler (Wiley, New York, 1994).
9. I. N. Mihailescu and E. György, Pulsed Laser Deposition: An Overview, edited by T. Asakura (Springer, Berlin, 1999), pp. 201-214.
10. E. D'Anna, A. Luches, A. Perrons, S. Aquaviva, R. Alexandrescu, I. N. Mihailescu, J. Zemek, and G. Majni, Appl. Surf. Sci. 106, 126 (1996).
11. A. P. Caricato et al., Thin Solid Films 307, 54 (1997).
12. M. L. De Giorgi el al., Appl. Surf. Sci. 127/129, 481 (1998).
13. E. György, V. Nelea, I. N. Mihailescu, A. Perrone, H. Pelletier, A. Cornet, S. Ganatsios, and J. Werckmann, Thin Solid Films 388, 93 (2001).
14. E. György, I. N. Mihailescu, M. Baleva, E. P. Trifonova, M. Abrashev, V. Darakchieva, A. Zocco, and A. Perrone, J. Mater. Sci. 36, 1951 (2001).
15. E. György, I. N. Mihailescu, M. Baleva, M. Abrashev, E. P. Trifonova, A. Szekeres, and A. Perrone, Mater. Sci. Eng., B 97, 251 (2003).
16. K. Ebihara, T. Nakamiya, T. Ohshima, T. Ikegami, and S. Aoqui, Diamond Relat. Mater. 10, 900 (2001).
17. J. Hu, P. Yang, and C. M. Lieber, Phys. Rev. B 57, 3185 (1998).
18. Y. F. Lu, Z. M. Ren, T. C. Chong, B. A. Cheong, S. I. Pang, J. P. Wang, and K. Li, J. Appl. Phys. 86, 4954 (1999).
19. X. Wang and P. J. Martin. Appl. Phys. Lett. 68, 1177 (1996).
20. C. Godet, Philos. Mag. B 81, 205 (2001).
21. R. S. Elliot, Adv. Phys. 36, 135 (1987).
22. S. Simeonov, A. Gushterov, E. Kafedjiiska, and A. Szekeres, J. Mater. Sci.: Mater. Electron. 14, 801 (2003).
23. S. Simeonov, I. Yourukov, E. Kafedjiiska, and A. Szekeres (unpublished).
24. N. F. Mott, Adv. Phys. 46, 363 (1997).
25. R. M. Fleming et al., J. Appl. Phys. 88, 850 (2000).